A novel photoresist-based film-profile engineering scheme for fabricating double-gated, recess-channel IGZO thin-film transistors

2020 ◽  
Vol 59 (SG) ◽  
pp. SGGJ01
Author(s):  
Yu-An Huang ◽  
Kang-Pin Peng ◽  
Yu-Chiao Meng ◽  
Chun-Jung Su ◽  
Pei-Wen Li ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Engineering Scheme ◽  
Film Profile

Submicrometer p-Type SnO Thin-Film Transistors Fabricated by Film Profile Engineering Method

2019 ◽  
Vol 66 (4) ◽  
pp. 1766-1771 ◽  
Author(s):  
Ming-Hung Wu ◽  
Horng-Chih Lin ◽  
Pei-Wen Li
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Engineering Method ◽  
P Type ◽  
Film Profile

Implementation of Film Profile Engineering in the Fabrication of ZnO Thin-Film Transistors

2014 ◽  
Vol 61 (5) ◽  
pp. 1417-1422 ◽  
Author(s):  
Rong-Jhe Lyu ◽  
Horng-Chih Lin ◽  
Tiao-Yuan Huang
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Zno Thin Film ◽  
Film Profile

Short-channel ZnON thin-film transistors with film profile engineering

2016 ◽  
Author(s):  
Chin-I Kuan ◽  
Horng-Chih Lin ◽  
Pei-Wen Li ◽  
Tiao-Yuan Huang
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Short Channel ◽  
Film Profile

Downscaling Metal—Oxide Thin-Film Transistors to Sub-50 nm in an Exquisite Film-Profile Engineering Approach

2017 ◽  
Vol 64 (3) ◽  
pp. 1069-1075 ◽  
Author(s):  
Rong-Jhe Lyu ◽  
Bo-Shiuan Shie ◽  
Horng-Chih Lin ◽  
Pei-Wen Li ◽  
Tiao-Yuan Huang
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Thin Film Transistors ◽  
Oxide Thin Film ◽  
Engineering Approach ◽  
Metal Oxide Thin Film ◽  
Film Profile

100-nm IGZO Thin-Film Transistors With Film Profile Engineering

2014 ◽  
Vol 61 (6) ◽  
pp. 2224-2227 ◽  
Author(s):  
Horng-Chih Lin ◽  
Bo-Shiuan Shie ◽  
Tiao-Yuan Huang
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Film Profile

Fabrication of IGZO Thin-Film Transistors with Film Profile Engineering

2014 ◽  
Author(s):  
R.J. Lyu ◽  
H.C. Lin ◽  
T.Y. Huang
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Film Profile
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