Oxygen and Fluorine Treatment Effect on Silicon Surface Characterized by High-Sensitivity Infrared Reflection Spectroscopy
1994 ◽
Vol 79-80
◽
pp. 409-415
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2000 ◽
Vol 486
(2)
◽
pp. 119-125
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1974 ◽
Vol 11
(11)
◽
pp. A219
2021 ◽
1970 ◽
Vol 19
(2)
◽
pp. 154-161
◽
1994 ◽
Vol 65
(8)
◽
pp. 2731-2732
◽
1985 ◽
Vol 4
(8)
◽
pp. 982-984
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