Mechanical Modeling of MEMS Devices: Static Analysis
Keyword(s):
2017 ◽
Vol 137
(1)
◽
pp. 46-47
2009 ◽
Vol 4
(4)
◽
pp. 54-56
Keyword(s):
2019 ◽
Keyword(s):
2009 ◽
Vol 32
(4)
◽
pp. 730-739
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