High-aspect-ratio aluminum-doped zinc oxide nanomechanical resonator

2017 ◽  
Vol 12 ◽  
pp. S141-S142
Author(s):  
Nguyen Van Toan ◽  
Naoki Inomata ◽  
Takahito Ono
Keyword(s):  
Zinc Oxide ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Nanomechanical Resonator ◽  
Aluminum Doped Zinc Oxide

scholarly journals Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Nguyen Van Toan ◽  
Truong Thi Kim Tuoi ◽  
Naoki Inomata ◽  
Masaya Toda ◽  
Takahito Ono
Keyword(s):  
Thin Film ◽  
Electron Microscopy ◽  
Zinc Oxide ◽  
Aspect Ratio ◽  
Dopant Concentration ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Azo Thin Film ◽  
Aluminum Doped Zinc Oxide ◽  
Deposited Film

AbstractThis work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film and its novel applications to micro- and nano-devices. The AZO thin film is deposited successfully by atomic layer deposition (ALD). 50 nm-thick AZO film with high uniformity is checked by scanning electron microscopy. The element composition of the deposited film with various aluminum dopant concentration is analyzed by energy-dispersive X-ray spectroscopy. In addition, a polycrystalline feature of the deposited film is confirmed by selected area electron diffraction and high-resolution transmission electron microscopy. The lowest sheet resistance of the deposited AZO film is found at 0.7 kΩ/□ with the aluminum dopant concentration at 5 at.%. A novel method employed the ALD in combination with the sacrificial silicon structures is proposed which opens the way to create the ultra-high aspect ratio AZO structures. Moreover, based on this finding, three kinds of micro- and nano-devices employing the deposited AZO thin film have been proposed and demonstrated. Firstly, nanowalled micro-hollows with an aspect ratio of 300 and a height of 15 µm are successfully produced . Secondly, micro- and nano-fluidics, including a hollow fluidic channel with a nanowall structure as a resonator and a fluidic capillary window as an optical modulator is proposed and demonstrated. Lastly, nanomechanical resonators consisting of a bridged nanobeam structure and a vertical nanomechanical capacitive resonator are fabricated and evaluated.

Simple and Versatile High Aspect Ratio Nanostructuring via Zinc Oxide Masking

2017 ◽  
Vol 2 (9) ◽  
pp. 1700107 ◽  
Author(s):  
Agnieszka Gwiazda ◽  
Anna Rumyantseva ◽  
Anisha Gokarna ◽  
Komla Nomenyo ◽  
Clotaire Chevalier-César ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Aspect Ratio ◽  
High Aspect Ratio

Enhanced electron field emission properties of high aspect ratio silicon nanowire–zinc oxide core–shell arrays

2012 ◽  
Vol 14 (13) ◽  
pp. 4614 ◽  
Author(s):  
Vinayak S. Kale ◽  
Rajiv Ramanujam Prabhakar ◽  
Stevin S. Pramana ◽  
Manohar Rao ◽  
Chorng-Haur Sow ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Aspect Ratio ◽  
Field Emission ◽  
High Aspect Ratio ◽  
Silicon Nanowire ◽  
Core Shell ◽  
Electron Field Emission ◽  
Field Emission Properties ◽  
Electron Field ◽  
Electron Field Emission Properties

Antibody immobilization for ZnO nanowire based biosensor application

2014 ◽  
Vol 1675 ◽  
pp. 33-39 ◽  
Author(s):  
Ankur Gupta ◽  
Monalisha Nayak ◽  
Deepak Singh ◽  
Shantanu Bhattacharya
Keyword(s):  
Zinc Oxide ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
High Surface ◽  
High Surface Area ◽  
Solution Chemistry ◽  
Surface Topology ◽  
Antibody Activity ◽  
Antibody Immobilization ◽  
Protein Assay

ABSTRACTDue to the high surface area and good bio-compatibility of nano structured ZnO, it finds good utility in biosensor applications. In this work we have fabricated highly dense ZnO nano bundles with the assistance of self assembled poly methylsilisesquoxane (PMSSQ) matrix which has been realized in a carpet like configuration with implanted ZnO nano-seeds. Such high aspect ratio structures (∼50) with carpet like layout have been realized for the first time using solution chemistry. Nanoparticles of PMMSQ are mixed with a nano-assembler Poly-propylene glycol (PPG) and Zinc Oxide nanoseeds (5-15 nm). The PPG acts by assembling the PMSSQ nanoparticles and evaporates from this film thus creating the highly porous nano-assembly of PMMSQ nanoparticles with implanted Zinc Oxide seeds. Nano-wire bundles with a high overall surface roughness are grown over this template by a daylong incubation of an aqueous solution of hexamethylene tetra amine and Zinc nitrate. Characterization of the fabricated structures has been extensively performed using FESEM, EDAX, and XRD. We envision these films to have potential of highly dense immobilization platforms for antibodies in immunosensors. The principle advantage in our case is a high aspect ratio of the nano-bundles and a high level of roughness in overall surface topology of the carpet outgrowing the zinc-oxide nanowire bundles. Antibody immobilization has been performed by modifying the surface with protein-G followed by Goat anti salmonella antibody. Antibody activity has been characterized by using 3D profiler, Bio-Rad Protein assay and UV-Visible spectrophotometer.

Self-Organized and High Aspect Ratio Nanoporous Zinc Oxide Prepared by Anodization

2019 ◽  
Vol 13 (3) ◽  
pp. 183-189 ◽  
Author(s):  
Sachiko Ono ◽  
Yuta Kobayashi ◽  
Hidetaka Asoh
Keyword(s):  
Zinc Oxide ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Self Organized
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