Ion-Beam Induced Diamond-Like Carbon Coatings

1989 ◽  
pp. 455-475 ◽  
Author(s):  
A. Anttila
Keyword(s):  
Ion Beam ◽  
Diamond Like Carbon ◽  
Carbon Coatings

Ultra-thin nano-patterned wear-protective diamond-like carbon coatings deposited on glass using a C 60 ion beam

Carbon ◽  
2014 ◽  
Vol 80 ◽  
pp. 534-543 ◽  
Author(s):  
Mahdi Khadem ◽  
Oleksiy V. Penkov ◽  
Volodymyr E. Pukha ◽  
Maxim V. Maleyev ◽  
Dae-Eun Kim
Keyword(s):  
Ion Beam ◽  
Diamond Like Carbon ◽  
Carbon Coatings

Ion Beam Assisted Deposition of Si-Diamond-Like Carbon Coatings on Large Area Substrates

1995 ◽  
Vol 396 ◽  
Author(s):  
Costas G. Fountzoulas
Keyword(s):  
Standard Deviation ◽  
Sliding Friction ◽  
Ion Beam ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Large Area ◽  
Carbon Coatings ◽  
Ion Beam Assisted Deposition ◽  
Deposition Parameters ◽  
Set Up

AbstractHard, low-friction silicon-containing diamond-like carbon coatings (Si-DLC), were formed by Ar+ ion beam assisted deposition (IBAD), on 5 in. diameter silicon wafers. The diffusion pump oil precursor (tetraphenyl-tetramethyl-trisiloxane: (C6H5)4(CH3)4Si3O2) was evaporated through seven, 3 mm diameter, closely packed apertures (multinozzle/multi-aperture container) arranged in a hexagonal pattern, approximately 5 mm apart according to mathematical model [1[ developed at ARL describing the spatial distribution of film deposition from nozzles and apertures onto inclined substrates.The ion energy was kept at 40 keV whereas the ion current density and the oil evaporation temperature were varied to produce hard, lubricious and adherent films. The multinozzle array allowed the relatively uniform (± 20%) coverage of the entire 5 in. substrate. The thickness and the microhardness of the films were measured along the rectilinear surface coordinates of the substrate area. Depending on the deposition parameters the standard deviation of the coating thicknesses and Knoop micro-hardness varied from 14 to 30 percent respectively over the substrate. This is a significant improvement from the previously used single nozzle set up where the standard deviation of the coating thickness was 50 to 100 percent for 2 in. diameter substrates. The Knoop microhardness and the sliding friction coefficient of these coatings ranged from 10,000 to 20,000 MPa and 0.04 to 0.2 respectively. These values are in agreement with our previously reported single nozzle results [2].

Preparation of Hard Coatings on Polycarbonate Substrate by High Frequency Ion Beam, Deposition using CH4/H2 Gases

1997 ◽  
Vol 504 ◽  
Author(s):  
S. R. Kim ◽  
J. S. Song ◽  
Y. J. Choi ◽  
J. H. Kim
Keyword(s):  
High Frequency ◽  
Ion Beam ◽  
Hard Coatings ◽  
Diamond Like Carbon ◽  
Carbon Coatings ◽  
Dlc Coatings ◽  
Engineering Plastics ◽  
High Impact Strength ◽  
Polycarbonate Substrate ◽  
Beam Deposition

ABSTRACTPolycarbonate is one of the most widely used engineering plastics because of its transparency and high impact strength. The poor wear and scratch properties of polycarbonate have limited its application in many fields. In order to improve the wear and scratch properties of polycarbonate we have deposited diamond like carbon (DLC) coatings. The diamond like carbon coatings were made using a high frequency ion beam gun by introducing H2 and CH4 gases. The coatings were characterized with scanning electron microscope, Raman spectroscopy, ellipsometer, and microscratch tester. Polymer hard coating was applied onto the polycarbonate substrate before depositing a diamond like carbon coating to see the effect of interlayer on the system's failure mechanism.

Electron energy loss spectroscopy of diamond-like carbon thin films

1992 ◽  
Vol 50 (2) ◽  
pp. 1272-1273
Author(s):  
J. Kulik ◽  
Y. Lifshitz ◽  
G.D. Lempert ◽  
S. Rotter ◽  
J.W. Rabalais ◽  
...  
Keyword(s):  
Thin Films ◽  
Energy Loss ◽  
Electron Energy ◽  
Ion Beam ◽  
Diamond Like Carbon ◽  
Ion Beam Deposition ◽  
Chemistry Research ◽  
Carbon Thin Films ◽  
Electron Energy Loss ◽  
Beam Deposition

Carbon thin films with diamond-like properties have generated significant interest in condensed matter science in recent years. Their extreme hardness combined with insulating electronic characteristics and high thermal conductivity make them attractive for a variety of uses including abrasion resistant coatings and applications in electronic devices. Understanding the growth and structure of such films is therefore of technological interest as well as a goal of basic physics and chemistry research. Recent investigations have demonstrated the usefulness of energetic ion beam deposition in the preparation of such films. We have begun an electron microscopy investigation into the microstructure and electron energy loss spectra of diamond like carbon thin films prepared by energetic ion beam deposition.The carbon films were deposited using the MEIRA ion beam facility at the Soreq Nuclear Research Center in Yavne, Israel. Mass selected C+ beams in the range 50 to 300 eV were directed onto Si {100} which had been etched with HF prior to deposition.

An Study of Influence of Imperfections on the Delamination of Diamond-Like Carbon Films

2002 ◽  
Vol 719 ◽  
Author(s):  
Myoung-Woon Moon ◽  
Kyang-Ryel Lee ◽  
Jin-Won Chung ◽  
Kyu Hwan Oh
Keyword(s):  
Cross Sections ◽  
Focused Ion Beam ◽  
Imaging System ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Glass Substrates ◽  
Atomic Force ◽  
Initiation And Propagation

AbstractThe role of imperfections on the initiation and propagation of interface delaminations in compressed thin films has been analyzed using experiments with diamond-like carbon (DLC) films deposited onto glass substrates. The surface topologies and interface separations have been characterized by using the Atomic Force Microscope (AFM) and the Focused Ion Beam (FIB) imaging system. The lengths and amplitudes of numerous imperfections have been measured by AFM and the interface separations characterized on cross sections made with the FIB. Chemical analysis of several sites, performed using Auger Electron Spectroscopy (AES), has revealed the origin of the imperfections. The incidence of buckles has been correlated with the imperfection length.

On the adhesion of diamond‐like carbon coatings deposited by low‐pressure plasma on 316L stainless steel

2021 ◽  
Author(s):  
Gabriel Morand ◽  
Pascale Chevallier ◽  
Linda Bonilla‐Gameros ◽  
Stéphane Turgeon ◽  
Maxime Cloutier ◽  
...  
Keyword(s):  
Stainless Steel ◽  
316L Stainless Steel ◽  
Low Pressure ◽  
Diamond Like Carbon ◽  
Carbon Coatings ◽  
Pressure Plasma ◽  
Low Pressure Plasma

Large Area Surface Treatment by Ion Beam Technology

1996 ◽  
Vol 438 ◽  
Author(s):  
R. L. C. Wu ◽  
W. Lanter
Keyword(s):  
Ion Beam ◽  
High Vacuum ◽  
Polycrystalline Diamond ◽  
Carbon Films ◽  
Ultra High Vacuum ◽  
Diamond Like Carbon ◽  
Chemical Compositions ◽  
Rf Power ◽  
Large Area ◽  
Ion Energy

AbstractAn ultra high vacuum ion beam system, consisting of a 20 cm diameter Rf excilted (13.56 MHz) ion gun and a four-axis substrate scanner, has been used to modify large surfaces (up to 1000 cm2) of various materials, including; infrared windows, silicon nitride, polycrystalline diamond, 304 and 316 stainless steels, 440C and M50 steels, aluminum alloys, and polycarbonates; by depositing different chemical compositions of diamond-like carbon films. The influences of ion energy, Rf power, gas composition (H2/CH4 , Ar/CH4 and O2/CH4/H2), on the diamond-like carbon characteristics has been studied. Particular attention was focused on adhesion, environmental effects, IR(3–12 μm) transmission, coefficient of friction, and wear factors under spacelike environments of diamond-like carbon films on various substrates. A quadrupole mass spectrometer was utilized to monitor the ion beam composition for quality control and process optimization.

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