Low-Temperature deposition of dielectric films by microwave plasma enhanced decomposition of hexamethyldisilazane
1991 ◽
Vol 20
(11)
◽
pp. 907-913
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Keyword(s):
1997 ◽
Vol 15
(6)
◽
pp. 1919
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1994 ◽
Vol 102
(1181)
◽
pp. 13-17
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1990 ◽
Vol 5
(4)
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pp. 361-363
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1996 ◽
Vol 47
(4)
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pp. 372-375
Keyword(s):
Keyword(s):
2011 ◽
Vol 26
(1)
◽
pp. 12-16
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1997 ◽
Vol 15
(4)
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pp. 1951-1954
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2008 ◽
Vol 202
(10)
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pp. 2126-2131
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