Low-Temperature deposition of dielectric films by microwave plasma enhanced decomposition of hexamethyldisilazane

1991 ◽  
Vol 20 (11) ◽  
pp. 907-913 ◽  
Author(s):  
S. K. Ray ◽  
C. K. Maiti ◽  
N. B. Chakrabarti
1999 ◽  
Vol 67-68 ◽  
pp. 119-124
Author(s):  
P. Müller ◽  
W.M. Holber ◽  
W. Henrion ◽  
E. Nebauer ◽  
Viktor Schlosser ◽  
...  

2011 ◽  
Vol 26 (1) ◽  
pp. 12-16 ◽  
Author(s):  
Xiong-Fei ZHENG ◽  
Wen-Jie ZHAI ◽  
Ying-Chun LIANG ◽  
Tao SUN

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