Aerostatic moving stage positioning compensation using a numerical algorithm combined with an image acquisition method
2019 ◽
Vol 104
(1-4)
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pp. 1203-1210
2018 ◽
Vol 27
(2)
◽
pp. 167-172
Keyword(s):
2013 ◽
Vol 313-314
◽
pp. 1197-1200
Keyword(s):
Keyword(s):
2013 ◽
Vol 397-400
◽
pp. 2196-2199
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