In situ Silicon-Wafer Surface-Temperature Measurements Utilizing Polarized Light

2011 ◽  
Vol 32 (11-12) ◽  
pp. 2304-2316 ◽  
Author(s):  
Y. Yamada ◽  
J. Ishii
Keyword(s):  
Surface Temperature ◽  
Silicon Wafer ◽  
Polarized Light ◽  
Temperature Measurements ◽  
Wafer Surface ◽  
Silicon Wafer Surface

Force Curve Measurements with the AFM: Application to the In Situ Determination of Grafted Silicon-Wafer Surface Energies

2006 ◽  
Vol 82 (7) ◽  
pp. 649-669 ◽  
Author(s):  
Olivier Noel ◽  
Houssein Awada ◽  
Gilles Castelein ◽  
Maurice Brogly ◽  
Jacques Schultz
Keyword(s):  
Silicon Wafer ◽  
Wafer Surface ◽  
Force Curve ◽  
Surface Energies ◽  
Silicon Wafer Surface

Characterization of Crystal Quality by Crystal Originated Particle Delineation and the Impact on the Silicon Wafer Surface

1998 ◽  
Vol 145 (1) ◽  
pp. 275-284 ◽  
Author(s):  
D. Gräf ◽  
M. Suhren ◽  
U. Lambert ◽  
R. Schmolke ◽  
A. Ehlert ◽  
...  
Keyword(s):  
Silicon Wafer ◽  
Crystal Quality ◽  
Wafer Surface ◽  
Silicon Wafer Surface ◽  
The Impact
Sign in / Sign up

Export Citation Format

Share Document