Residual stress and strain distribution anomalies in TiN films deposited by physical vapor deposition
1990 ◽
Vol 42
(1)
◽
pp. 49-68
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Keyword(s):
1990 ◽
Vol 8
(4)
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pp. 3186-3193
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2010 ◽
Vol 126-128
◽
pp. 564-569
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1990 ◽
Vol 8
(3)
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pp. 1351-1358
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Keyword(s):
2007 ◽
Vol 305
(1)
◽
pp. 50-54
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Keyword(s):
2017 ◽
Vol 2017
(9)
◽
pp. 157-170
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2019 ◽
Vol 29
(3)
◽
pp. 175-181
2020 ◽
Vol 10
(2)
◽
pp. 122-126