Effects of thickness and annealing on the properties of Ti-doped ZnO films by radio frequency magnetron sputtering

Current Applied Physics ◽

10.1016/j.cap.2010.11.110 ◽

2011 ◽

Vol 11 (1) ◽

pp. S185-S190 ◽

Author(s):

Hung-Peng Chang ◽

Fang-Hsing Wang ◽

Jen-Chi Chao ◽

Chia-Cheng Huang ◽

Han-Wen Liu

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

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Relation between surface and bulk electronic properties of Al doped ZnO films deposited at varying substrate temperature by radio frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.4923224 ◽

2015 ◽

Vol 117 (24) ◽

pp. 245312 ◽

Author(s):

C. C. Singh ◽

T. A. Patel ◽

E. Panda

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Electronic Properties ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

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Effects of substrate on the structural, electrical and optical properties of Al-doped ZnO films prepared by radio frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2008.11.103 ◽

2009 ◽

Vol 517 (11) ◽

pp. 3265-3268 ◽

Author(s):

C. Li ◽

M. Furuta ◽

T. Matsuda ◽

T. Hiramatsu ◽

H. Furuta ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Electrical And Optical Properties ◽

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Characteristics and luminescence of Ge doped ZnO films prepared by alternate radio frequency magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2004.10.037 ◽

2005 ◽

Vol 245 (1-4) ◽

pp. 414-419 ◽

Author(s):

D.H. Fan ◽

Z.Y. Ning ◽

M.F. Jiang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

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Effect of substrate temperature on F and Al co-doped ZnO films deposited by radio frequency magnetron sputtering

Solar Energy ◽

10.1016/j.solener.2019.09.095 ◽

2019 ◽

Vol 194 ◽

pp. 471-477 ◽

Author(s):

Yanfeng Wang ◽

Jianmin Song ◽

Jie Zhang ◽

Guoxi Zheng ◽

Xiaochen Duan ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno ◽

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Improved Crystal Quality of Transparent Conductive Ga-doped ZnO Films by Magnesium Doping Through Radio-Frequency Magnetron Sputtering Preparation

Journal of the American Ceramic Society ◽

10.1111/jace.12630 ◽

2014 ◽

Vol 97 (2) ◽

pp. 473-480 ◽

Author(s):

Wei-Sheng Liu ◽

Wei-Ku Chen ◽

Shen-Yu Wu ◽

Kuang-Po Hsueh

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Crystal Quality ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Magnesium Doping ◽

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Growth ambient dependent electrical properties of lithium and nitrogen dual-doped ZnO films prepared by radio-frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2009.09.008 ◽

2010 ◽

Vol 518 (12) ◽

pp. 3289-3292 ◽

Author(s):

T.T. Zhao ◽

T. Yang ◽

B. Yao ◽

C.X. Cong ◽

Y.R. Sui ◽

...

Keyword(s):

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

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Fast response ultraviolet photoconductive detectors based on Ga-doped ZnO films grown by radio-frequency magnetron sputtering

Applied Surface Science ◽

10.1016/j.apsusc.2010.07.091 ◽

2010 ◽

Vol 257 (3) ◽

pp. 921-924 ◽

Author(s):

Jian Sun ◽

Feng-Juan Liu ◽

Hai-Qin Huang ◽

Jian-Wei Zhao ◽

Zuo-Fu Hu ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Fast Response ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Photoconductive Detectors ◽

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Microstructural and optical properties of Ta-doped ZnO films prepared by radio frequency magnetron sputtering

Ceramics International ◽

10.1016/j.ceramint.2016.03.214 ◽

2016 ◽

Vol 42 (9) ◽

pp. 10847-10853 ◽

Author(s):

Yongheng Wu ◽

Cuiping Li ◽

Mingji Li ◽

Hongji Li ◽

Sheng Xu ◽

...

Keyword(s):

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

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Realization of p-type Se–N co-doped ZnO films by radio-frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2013.07.008 ◽

2013 ◽

Vol 108 ◽

pp. 183-185 ◽

Author(s):

Hui Cai ◽

Hongbin Xu ◽

Zhizhen Ye ◽

Jingyun Huang

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Radio Frequency Magnetron Sputtering ◽

Doped Zno ◽

P Type ◽

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Change of scattering mechanism and annealing out of defects on Ga-doped ZnO films deposited by radio-frequency magnetron sputtering

Journal of Applied Physics ◽

10.1063/1.4954001 ◽

2016 ◽

Vol 119 (23) ◽

pp. 235302 ◽

Author(s):

Lukman Nulhakim ◽

Hisao Makino

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Scattering Mechanism ◽

Radio Frequency Magnetron Sputtering ◽

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