Selective epitaxial growth of SiGe for strained Si transistors

2006 ◽  
Vol 134 (2-3) ◽  
pp. 165-171 ◽  
Author(s):  
X.J. Ning ◽  
D. Gao ◽  
P. Bonfanti ◽  
H. Wu ◽  
J. Guo ◽  
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Keyword(s):  
Epitaxial Growth ◽  
Strained Si ◽  
Selective Epitaxial Growth

Fabrication of strained Si nMOSFET transistors on thin buffer layers with selective and non-selective epitaxial growth techniques

2005 ◽  
Vol 8 (1-3) ◽  
pp. 337-342 ◽  
Author(s):  
Geert Eneman ◽  
Peter Verheyen ◽  
Rita Rooyackers ◽  
Romain Delhougne ◽  
Roger Loo ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Buffer Layers ◽  
Strained Si ◽  
Selective Epitaxial Growth

Thick selective epitaxial growth of silicon at 960°C using silane only

1992 ◽  
Vol 18 (3) ◽  
pp. 237-246 ◽  
Author(s):  
N. Afshar-Hanaii ◽  
J.M. Bonar ◽  
A.G.R. Evans ◽  
G.J. Parker ◽  
C.M.K. Starbuck ◽  
...  
Keyword(s):  
Epitaxial Growth ◽  
Selective Epitaxial Growth

Selective epitaxial growth of silicon in pancake reactors

1988 ◽  
Vol 43 (8) ◽  
pp. 2031-2036 ◽  
Author(s):  
M. Kastelic ◽  
I. Oh ◽  
C.G. Takoudis ◽  
J.A. Friedrich ◽  
G.W. Neudeck
Keyword(s):  
Epitaxial Growth ◽  
Selective Epitaxial Growth

Selective epitaxial growth of Ge 1−x Sn x on Si by using metal-organic chemical vapor deposition

2017 ◽  
Vol 468 ◽  
pp. 614-619 ◽  
Author(s):  
Tomoya Washizu ◽  
Shinichi Ike ◽  
Yuki Inuzuka ◽  
Wakana Takeuchi ◽  
Osamu Nakatsuka ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Selective Epitaxial Growth ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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