Microelectronic Engineering
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Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Cu seed step coverage evolution with target lifetime for long-throw self ionized physical vapor deposition chambers

2022 ◽  
pp. 111717
Author(s):  
Elisa Pegoraro ◽  
Alberto Perrotta ◽  
Gianpaolo Lorito ◽  
Laura Bertarelli ◽  
Benoit-Noel Bozon ◽  
...  
Keyword(s):  
Vapor Deposition ◽  
Physical Vapor Deposition ◽  
Step Coverage ◽  
Ionized Physical Vapor Deposition

Progress in SiC nanowire field-effect-transistors for integrated circuits and sensing applications

2022 ◽  
pp. 111704
Author(s):  
Konstantinos Zekentes ◽  
Jihoon Choi ◽  
Valérie Stambouli ◽  
Edwige Bano ◽  
Olfa Karker ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Field Effect ◽  
Field Effect Transistors ◽  
Sensing Applications

A low-g omnidirectional MEMS inertial switch with load direction identification

2022 ◽  
Vol 253 ◽  
pp. 111679
Author(s):  
Liqun Du ◽  
Yang Yu ◽  
Bowen Yuan ◽  
Bingjiang Guo ◽  
Chao Wang ◽  
...  
Keyword(s):  
Load Direction ◽  
Inertial Switch

Impact of Sn on the Ti/Ge solid-state reaction: Phase formation sequence, morphological and electrical properties

2022 ◽  
Vol 252 ◽  
pp. 111667
Author(s):  
Andrea Quintero ◽  
Patrice Gergaud ◽  
Jean-Michel Hartmann ◽  
Vincent Reboud ◽  
Eric Cassan ◽  
...  
Keyword(s):  
Solid State ◽  
Electrical Properties ◽  
Phase Formation ◽  
Solid State Reaction ◽  
Reaction Phase
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