Theoretical investigation of plasma immersion ion implantation of cylindrical bore using hollow cathode plasma discharge

2009 ◽  
Vol 203 (17-18) ◽  
pp. 2727-2730 ◽  
Author(s):  
Xiubo Tian ◽  
Chunzhi Gong ◽  
Yongxian Huang ◽  
Haifu Jiang ◽  
Shiqin Yang ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Theoretical Investigation ◽  
Hollow Cathode ◽  
Plasma Discharge ◽  
Cathode Plasma ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation

Design of Plasma Discharge Structure for Surface Treatment of PP Film

2016 ◽  
Vol 693 ◽  
pp. 77-83 ◽  
Author(s):  
Yi Fang Wen ◽  
Tai Yong Wang ◽  
Hong Wei Wang
Keyword(s):  
Low Temperature ◽  
Hollow Cathode ◽  
Plasma Discharge ◽  
High Energy ◽  
Environment Pollution ◽  
Low Temperature Plasma ◽  
Cathode Plasma ◽  
Temperature Plasma ◽  
Discharge Structure ◽  
Before And After

Low temperature plasma, compared to liquid phase treatment, can effectively overcome the environment pollution, high energy loss and high cost as its high activity. The low temperature plasma, which is not only fairly friendly to the environment but also of less resource consumption, also can realize the cleaning, activating and grafting treatment for materials surface. Based on the numerical model of CRFHCP (Capacitive Radio Frequency Hollow Cathode Plasma) hollow cathode plasma discharge, the key point to affect plasma discharge was analyzed and the morphology of PP film before and after hollow cathode plasma discharge was analyzed. The results showed that the structure of plasma hollow cathode discharge can effectively improved the chemical behaviors of PP film.

Pulsed sheath dynamics in a small cylindrical bore with an auxiliary electrode for plasma immersion ion implantation

1997 ◽  
Vol 4 (12) ◽  
pp. 4431-4434 ◽  
Author(s):  
X. C. Zeng ◽  
A. G. Liu ◽  
T. K. Kwok ◽  
P. K. Chu ◽  
B. Y. Tang
Keyword(s):  
Ion Implantation ◽  
Auxiliary Electrode ◽  
Cylindrical Bore ◽  
Plasma Immersion Ion Implantation

DLC deposition inside tubes using hollow cathode discharge plasma immersion ion implantation and deposition

2010 ◽  
Vol 204 (18-19) ◽  
pp. 2909-2912 ◽  
Author(s):  
X.B. Tian ◽  
H.F. Jiang ◽  
C.Z. Gong ◽  
S.Q. Yang ◽  
R.K.Y. Fu ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Hollow Cathode ◽  
Discharge Plasma ◽  
Hollow Cathode Discharge ◽  
Plasma Immersion Ion Implantation
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