High-rate sputter deposition of chromium oxide thin films using water vapor as a reactive gas

2020 ◽  
Vol 387 ◽  
pp. 125509
Author(s):  
Fan Wang ◽  
Yoshio Abe ◽  
Midori Kawamura ◽  
Kyung Ho Kim ◽  
Takayuki Kiba
Keyword(s):  
Thin Films ◽  
Water Vapor ◽  
Chromium Oxide ◽  
Sputter Deposition ◽  
High Rate ◽  
Oxide Thin Films ◽  
Reactive Gas

Deposition Rate and Electrochromic Properties of Ni Oxide Thin Films Deposited By Sputtering Using Water Vapor As a Reactive Gas

2020 ◽  
Vol MA2020-02 (32) ◽  
pp. 2068-2068
Author(s):  
Masaki Kataoka ◽  
Yoshio Abe ◽  
Midori Kawamura ◽  
Kyung Ho Kim ◽  
Takayuki Kiba
Keyword(s):  
Thin Films ◽  
Water Vapor ◽  
Deposition Rate ◽  
Oxide Thin Films ◽  
Electrochromic Properties ◽  
Ni Oxide ◽  
Reactive Gas

scholarly journals High-rate reactive-ECR-sputter-deposition of Ni-Zn ferrite thin films using conic sputtering target

2004 ◽  
Vol 28 (5) ◽  
pp. 703-706 ◽  
Author(s):  
S. Yamamoto ◽  
T. Ogita ◽  
H. Kurisu ◽  
M. Matsuura ◽  
Y. Shimosato ◽  
...  
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
High Rate ◽  
Zn Ferrite ◽  
Ferrite Thin Films

Characterization of sputter-deposited chromium oxide thin films

1999 ◽  
Vol 120-121 ◽  
pp. 277-283 ◽  
Author(s):  
P. Hones ◽  
M. Diserens ◽  
F. Lévy
Keyword(s):  
Thin Films ◽  
Chromium Oxide ◽  
Oxide Thin Films ◽  
Sputter Deposited

Growth and composition of nanostructured and nanoporous cerium oxide thin films on a graphite foil

Nanoscale ◽  
2015 ◽  
Vol 7 (9) ◽  
pp. 4038-4047 ◽  
Author(s):  
Jaroslava Lavkova ◽  
Ivan Khalakhan ◽  
Mykhailo Chundak ◽  
Mykhailo Vorokhta ◽  
Valerie Potin ◽  
...  
Keyword(s):  
Thin Films ◽  
Porous Structure ◽  
Cerium Oxide ◽  
Oxide Catalyst ◽  
Sputter Deposition ◽  
Graphite Foil ◽  
Oxide Thin Films ◽  
Catalyst Layers ◽  
Etching Effect ◽  
Cerium Oxide Catalyst

The porous structure of cerium oxide catalyst layers on a graphite foil as a result of the carbon etching effect during sputter deposition.

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