Tuning of electrical and structural properties of indium oxide films grown by metal organic chemical vapor deposition

2007 ◽  
Vol 515 (16) ◽  
pp. 6611-6614 ◽  
Author(s):  
Ch.Y. Wang ◽  
V. Cimalla ◽  
H. Romanus ◽  
Th. Kups ◽  
M. Niebelschütz ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Structural Properties ◽  
Indium Oxide ◽  
Vapor Deposition ◽  
Oxide Films ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition ◽  
Indium Oxide Films

Transparent conducting indium oxide thin films grown by low-temperature metal organic chemical vapor deposition

2007 ◽  
Vol 515 (5) ◽  
pp. 2921-2925 ◽  
Author(s):  
Chunyu Wang ◽  
Volker Cimalla ◽  
Genady Cherkashinin ◽  
Henry Romanus ◽  
Majdeddin Ali ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Indium Oxide ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Transparent Conducting ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Metal-Organic Chemical Vapor Deposition of Metal Oxide Films and Nanostructures

2012 ◽  
pp. 291-336 ◽  
Author(s):  
Sanjay Mathur ◽  
Aadesh Pratap Singh ◽  
Ralf Müller ◽  
Tessa Leuning ◽  
Thomas Lehnen ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Metal Oxide ◽  
Vapor Deposition ◽  
Oxide Films ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Oxide Films ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
Sign in / Sign up

Export Citation Format

Share Document