Change of the electron effective mass in extremely heavily doped n-type Si obtained by ion implantation and laser annealing

1983 ◽  
Vol 14 (3) ◽  
pp. 91
1990 ◽  
Vol 68 (5) ◽  
pp. 2367-2375 ◽  
Author(s):  
D. M. Szmyd ◽  
P. Porro ◽  
A. Majerfeld ◽  
S. Lagomarsino

1979 ◽  
Vol 12 (12) ◽  
pp. 2289-2293 ◽  
Author(s):  
A Raymond ◽  
J L Robert ◽  
C Bernard

1983 ◽  
Vol 23 ◽  
Author(s):  
J. Wagner ◽  
G. Contreras ◽  
A. Compaan ◽  
M. Cardona ◽  
A. Axmann

ABSTRACTIt has been shown previously that dopant concentrations far above the equilibrium solubility limit can be obtained in semiconductors by pulsed laser annealing of heavily ion implanted material. We exploit this fact to study the photoluminescence of germanium with dopant concentrations up to 1021 cm−3. From this study we obtain information on the filling of higher lying band minima and the shift of the optical band gap as a function of carrier concentration over a much wider range than accessible with bulk doped material. In addition it is shown that photoluminescence provides a diagnostic tool to characterize implanted layers.


2008 ◽  
Vol 103 (10) ◽  
pp. 103528 ◽  
Author(s):  
J. Ibáñez ◽  
R. Cuscó ◽  
E. Alarcón-Lladó ◽  
L. Artús ◽  
A. Patanè ◽  
...  

Materials ◽  
2021 ◽  
Vol 14 (15) ◽  
pp. 4138
Author(s):  
Ye Yuan ◽  
Yufang Xie ◽  
Ning Yuan ◽  
Mao Wang ◽  
René Heller ◽  
...  

One of the most attractive characteristics of diluted ferromagnetic semiconductors is the possibility to modulate their electronic and ferromagnetic properties, coupled by itinerant holes through various means. A prominent example is the modification of Curie temperature and magnetic anisotropy by ion implantation and pulsed laser melting in III–V diluted magnetic semiconductors. In this study, to the best of our knowledge, we performed, for the first time, the co-doping of (In,Mn)As diluted magnetic semiconductors by Al by co-implantation subsequently combined with a pulsed laser annealing technique. Additionally, the structural and magnetic properties were systematically investigated by gradually raising the Al implantation fluence. Unexpectedly, under a well-preserved epitaxial structure, all samples presented weaken Curie temperature, magnetization, as well as uniaxial magnetic anisotropies when more aluminum was involved. Such a phenomenon is probably due to enhanced carrier localization introduced by Al or the suppression of substitutional Mn atoms.


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