A novel precision positioning table utilizing impact force of spring-mounted piezoelectric actuator—part I: experimental design and results

2003 ◽  
Vol 27 (1) ◽  
pp. 14-21 ◽  
Author(s):  
Yung-Tien Liu ◽  
Toshiro Higuchi ◽  
Rong-Fong Fung
Keyword(s):  
Experimental Design ◽  
Piezoelectric Actuator ◽  
Impact Force ◽  
Precision Positioning

Application of DSP for Precision Positioning System Controlling

2004 ◽  
Author(s):  
Jau-Liang Chen ◽  
Tsang-Chou Li
Keyword(s):  
Standard Deviation ◽  
Piezoelectric Actuator ◽  
Feedforward Control ◽  
Displacement Sensor ◽  
Positioning System ◽  
Precision Positioning ◽  
Control Rule ◽  
Point Test ◽  
Lever Mechanism ◽  
Developing System

The objective of this research was to use a DSP for controlling a nano-precision positioning system. The positioning system was constructed by a piezoelectric actuator, a flexural stage that composed by notch hinges and parallel springs; capacitor sensor was used instead of laser interferometer as displacement sensor. In order to increase the traveling range of the stage, a lever mechanism was used to enlarge the displacement of the piezoelectric actuator. In this study a Dmatek PICE-DSP 320C542 microcomputer developing system was used as the controller, which contained a TI TMS320C542 DSP chip. PI feedback control rule together with n-times feedforward control rule were used for the controlling of this system. Three different experiments were conducted: (1) fixed-point test; (2) continuous stepping test; and (3) ramp-tracking test. From the experiment results, it was shown that the bias Ess was within 2 nm and the standard deviation 1σ was around 30 nm, with settling time less than 0.02 sec, in the continuous stepping test. While, in the ramp-tracking test, the bias Ess was less than 1.25 nm and the standard deviation 1σ was around 35 nm.

New amplified piezoelectric actuator for precision positioning and active damping

1997 ◽  
Author(s):  
Ronan Le Letty ◽  
Frank Claeyssen ◽  
Nicolas Lhermet ◽  
Philippe Bouchilloux
Keyword(s):  
Piezoelectric Actuator ◽  
Active Damping ◽  
Precision Positioning
Sign in / Sign up

Export Citation Format

Share Document