A self-moving precision positioning stage utilizing impact force of spring-mounted piezoelectric actuator

The piezoelectric actuator (PA) has been used for precision positioning from micrometer down to nanometer scale. In this paper, a spring-mounted PA is designed to achieve a high accuracy and self-moving ability in precision positioning motion. The contact force between the hammer and the self-moving stage, and the friction force of Leuven’s model caused between the grinded groove and the self-moving stage are considered. The governing equations of the system are formulated by using the finite-element method (FEM). The numerical solutions are provided to compare with the experimental results, and demonstrate the well agreement of the present theoretical formulations.

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A novel precision positioning table utilizing impact force of spring-mounted piezoelectric actuator—part I: experimental design and results

Precision Engineering ◽

10.1016/s0141-6359(02)00180-0 ◽

2003 ◽

Vol 27 (1) ◽

pp. 14-21 ◽

Cited By ~ 20

Author(s):

Yung-Tien Liu ◽

Toshiro Higuchi ◽

Rong-Fong Fung

Keyword(s):

Experimental Design ◽

Piezoelectric Actuator ◽

Impact Force ◽

Precision Positioning

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Comparison Between Three Tuning Methods of PID Control for High Precision Positioning Stage

MAPAN ◽

10.1007/s12647-014-0123-z ◽

2014 ◽

Vol 30 (1) ◽

pp. 65-70 ◽

Cited By ~ 3

Author(s):

Rajat Sen ◽

Chinmoy Pati ◽

Samik Dutta ◽

Ranjan Sen

Keyword(s):

High Precision ◽

Pid Control ◽

Precision Positioning ◽

Positioning Stage ◽

Tuning Methods

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Thermal Error Modeling of Precision Positioning Stage

Advanced Materials Research ◽

10.4028/www.scientific.net/amr.694-697.767 ◽

2013 ◽

Vol 694-697 ◽

pp. 767-770

Author(s):

Jing Shu Wang ◽

Ming Chi Feng

Keyword(s):

Thermal Deformation ◽

Thermal Error ◽

Error Modeling ◽

Precision Positioning ◽

Third Order ◽

Element Analysis ◽

The Finite Element Analysis ◽

Positioning Stage ◽

Order Polynomial ◽

The Relationship

As the thermal deformation significantly impacts the accuracy of precision positioning stage, it is necessary to realize the thermal error. The thermal deformation of the positioning stage is simulated by the finite element analysis. The relationship between the temperature variation and thermal error is fitted third-order polynomial function whose parameters are determined by genetic algorithm neural network (GANN). The operators of the GANN are optimized through a parametric study. The results show that the model can describe the relationship between the temperature and thermal deformation well.

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Design of a 6-DOF precision positioning stage: Kinematic analysis and dynamic modeling

2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) ◽

10.1109/3m-nano.2015.7425478 ◽

2015 ◽

Author(s):

Kunhai Cai ◽

Yanling Tian ◽

Zhen Yang ◽

Jiangkun Shang

Keyword(s):

Dynamic Modeling ◽

Kinematic Analysis ◽

Precision Positioning ◽

Positioning Stage

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Compounding Control of Ultra-precision Positioning Stage Based on Inverse Generalized PI Model

Journal of Mechanical Engineering ◽

10.3901/jme.2015.02.198 ◽

2015 ◽

Vol 51 (2) ◽

pp. 198 ◽

Cited By ~ 1

Author(s):

Yanbing TIAN

Keyword(s):

Precision Positioning ◽

Positioning Stage ◽

Ultra Precision

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A Novel Trans-Scale Precision Positioning Stage Based on the Stick-Slip Effect

International Journal of Intelligent Mechatronics and Robotics ◽

10.4018/ijimr.2012040101 ◽

2012 ◽

Vol 2 (2) ◽

pp. 1-14 ◽

Cited By ~ 2

Author(s):

Bowen Zhong ◽

Liguo Chen ◽

Zhenhua Wang ◽

Lining Sun

Keyword(s):

Friction Model ◽

Slip Effect ◽

Precision Positioning ◽

Stick Slip ◽

Kinematics Model ◽

Lugre Friction Model ◽

Positioning Stage ◽

Simulation Results ◽

Relationship Of ◽

The Relationship

This article focuses on developing a novel trans-scale precision positioning stage based on the stick-slip effect. The stick-slip effect is introduced and the rigid kinematics model of the stick-slip driving is established. The forward and return displacement equations of each step of the stick-slip driving are deduced. The relationship of return displacement and the acceleration produced by friction are obtained according to displacement equations. Combining with LuGre friction model, the flexible dynamics model of the stick-slip driving is established and simulated by using Simulink software. Simulation results show that the backward displacement will reduce with the acceleration of the slider produced by dynamic friction force, the rigid kinematics model is also verified by simulation results which are explained in further detail in the article.

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