Infrared absorption spectroscopy study of phase formation in SiC layers synthesized by carbon implantation into silicon with a metal vapor vacuum arc ion source
1998 ◽
Vol 140
(1-2)
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pp. 70-74
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2018 ◽
Vol 123
(10)
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pp. 5951-5963
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Vol 29
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pp. 2565-2572
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2022 ◽
pp. 120902
2019 ◽
Vol 849
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pp. 113362
2018 ◽
Vol 20
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pp. 27992-28000
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2018 ◽
Vol 122
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pp. 12341-12349
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