Influence of substrate bias on the structure and mechanical properties of ta-C:W films deposited by filtered cathodic vacuum arc

2001 ◽  
Vol 146-147 ◽  
pp. 398-404 ◽  
Author(s):  
Y.H Cheng ◽  
B.K Tay ◽  
S.P Lau ◽  
X Shi
Keyword(s):  
Mechanical Properties ◽  
Vacuum Arc ◽  
Substrate Bias ◽  
Influence Of Substrate ◽  
Filtered Cathodic Vacuum Arc

The effect of substrate bias on the characteristics of CrN coatings deposited by DC-superimposed HiPIMS system

2017 ◽  
Vol 31 (16-19) ◽  
pp. 1744032 ◽  
Author(s):  
X. Zuo ◽  
F. Xia ◽  
D. Zhang ◽  
P. L. Ke ◽  
Q. M. Wang ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Bias Voltage ◽  
Indentation Test ◽  
Grain Structure ◽  
Substrate Bias ◽  
Cross Sectional ◽  
Microstructure And Mechanical Properties ◽  
Columnar Grain ◽  
Influence Of Substrate ◽  
Crn Coatings

Chromium nitride coatings were prepared by reactive DC-superimposed high-power-impulse magnetron sputtering (HiPIMS) system. The influence of substrate bias on the microstructure and mechanical properties of CrN coatings was investigated. XRD and cross-sectional SEM were utilized to characterize the film structures. Mechanical properties were characterized by nanoindentation and Vickers indentation test. The results revealed that the microstructure and mechanical properties of CrN coatings were affected by bias voltage. The CrN coatings exhibited dense and fine columnar grain structure with the hardness of about 18.7 GPa. The fracture toughness of CrN coatings was around 3.16 MPa ⋅ m[Formula: see text]. However, further increase of the bias voltage from −250 V to −300 V led to the degradation of coating properties.

Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc

2004 ◽  
Vol 95 (7) ◽  
pp. 3509-3515 ◽  
Author(s):  
Zhenghao Gan ◽  
Yuebin Zhang ◽  
Guoqing Yu ◽  
C. M. Tan ◽  
S. P. Lau ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Vacuum Arc ◽  
Diamond Like Carbon ◽  
Carbon Thin Films ◽  
Filtered Cathodic Vacuum Arc
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