Microstructural and mechanical properties of nanometric-multilayered a-CN/a-C/…/a-CN coatings deposited by rf-magnetron sputtering and nitrogen ion-beam bombardment

2001 ◽  
Vol 10 (3-7) ◽  
pp. 952-955 ◽  
Author(s):  
F.J. Pino ◽  
E. Bertran ◽  
M.C. Polo ◽  
J.L. Andújar
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Ion Beam ◽  
Rf Magnetron Sputtering ◽  
Nitrogen Ion

Characteristics of Ion Beam Assisted ITO Thin Films Deposited by RF Magnetron Sputtering

2014 ◽  
Vol 601 (1) ◽  
pp. 57-63 ◽  
Author(s):  
Kyong Chan Heo ◽  
Phil Kook Son ◽  
Youngku Sohn ◽  
Jonghoon Yi ◽  
Jin Hyuk Kwon ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Ion Beam ◽  
Rf Magnetron Sputtering ◽  
Ito Thin Films

Effect of Ion-Beam Processing during RF Magnetron Sputtering on the properties of ZnO Films

2019 ◽  
Vol 53 (11) ◽  
pp. 1457-1464
Author(s):  
P. N. Krylov ◽  
A. S. Alalykin ◽  
E. A. Durman ◽  
R. M. Zakirova ◽  
I. V. Fedotova
Keyword(s):  
Magnetron Sputtering ◽  
Ion Beam ◽  
Rf Magnetron Sputtering ◽  
Zno Films

The influence of ion beam bombardment on the stress of carbon layers prepared by RF magnetron sputtering

Vacuum ◽  
2004 ◽  
Vol 76 (2-3) ◽  
pp. 329-333
Author(s):  
P. Hrkút ◽  
M. Držík ◽  
M. Mozolík ◽  
P. Kováč ◽  
Š. Haščík ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Ion Beam ◽  
Rf Magnetron Sputtering

Mechanical Properties of CrN Films Deposited by Magnetron Sputtering Method

Tribology ◽  
2006 ◽  
Author(s):  
A. H. Jayatissa ◽  
D. Wagner ◽  
S. Sorin ◽  
N. X. Randall
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Film Properties ◽  
Adhesion Properties ◽  
Force Microscopy ◽  
Glass Substrates ◽  
Atomic Force ◽  
Mechanical Coating ◽  
Deposition Conditions

The mechanical properties of CrN films coated by radio frequency (rf) magnetron sputtering method were investigated. CrN films were coated on stainless steel, silicon wafer and glass substrates using sputtering of a Cr target in nitrogen ambient. The films were coated by varying the deposition temperature, nitrogen partial pressure and rf power density. The films coated were characterized by nanoindentation method, microhardness, optical, and corrosion tests. In order to use CrN as mechanical coating material, the surface roughness, hardness and adhesion properties have to be determined. The film properties were measured using atomic force microscopy and nanoindentation method and analyzed as a function of deposition conditions. It was found that these properties can be varied by changing the deposition conditions.

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