Growth and physical properties of in situ phosphorus-doped RTLPCVD polycrystalline silicon thin films
1998 ◽
Vol 1
(3-4)
◽
pp. 299-302
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Keyword(s):
2013 ◽
Vol 210
(12)
◽
pp. 2729-2735
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2002 ◽
Vol 41
(Part 1, No. 2A)
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pp. 501-506
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1999 ◽
Vol 142
(1-4)
◽
pp. 400-406
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Keyword(s):
1994 ◽
Vol 33
(Part 1, No. 7B)
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pp. 4191-4194
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2007 ◽
Vol 71
(2)
◽
pp. 158-163
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2008 ◽
Vol 49
(4)
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pp. 723-727
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