scholarly journals High thermal stability and low power dissipation PCM with nanoscale oxygen‐doped SS thin film

2018 ◽  
Vol 12 (8) ◽  
pp. 1080-1083 ◽  
Author(s):  
Haipeng You ◽  
Yifeng Hu ◽  
Tianshu Lai ◽  
Qingqian Chou ◽  
Xiaoqin Zhu ◽  
...  
2014 ◽  
Vol 4 (3) ◽  
pp. 9-13
Author(s):  
M. Balaji ◽  
◽  
B. Keerthana ◽  
K. Varun ◽  
◽  
...  

2015 ◽  
Vol 43 (7) ◽  
pp. 430
Author(s):  
Tomofumi KISE ◽  
Hitoshi SHIMIZU ◽  
Hideyuki NASU

2021 ◽  
pp. 93-98
Author(s):  
Evgenii Erofeev ◽  
Egor Polyntsev ◽  
Sergei Ishutkin

Electrophysical characteristics and their thermal stability of thin-film resistors based on tantalum nitride (TaN) obtained by reactive magnetron sputtering were investigated. The optimal modes of the magnetron sputtering process are determined, ensuring the Ta2N phase film composition with the value of the specific electrical resistance of 250 μm cm and high thermal stability of the parameters. On the basis of the investigations carried out, thin-film matching resistors were manufactured for use as part of an electro-optical InP-based MZ modulator


Sign in / Sign up

Export Citation Format

Share Document