Structural and microstructural characterization of nanocrystalline silicon thin films obtained by radio-frequency magnetron sputtering
2007 ◽
pp. 487-490
2005 ◽
Vol 152
(12)
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pp. F213
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1995 ◽
Vol 10
(1-4)
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pp. 63-72
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1997 ◽
Vol 144
(8)
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pp. 2855-2858
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2000 ◽
Vol 375
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pp. 300-303
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1988 ◽
Vol 15
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pp. 235-242
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2006 ◽
Vol 433
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pp. 279-285
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