Mobility and carrier‐concentration profiles ofP+ion‐implanted, isothermally annealed silicon crystals
1975 ◽
Vol 127
(1)
◽
pp. 93-98
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Keyword(s):
Keyword(s):
1982 ◽
Vol 29
(2)
◽
pp. 205-211
◽
1973 ◽
Vol 16
(4)
◽
pp. 433-440
◽
1979 ◽
Vol 126
(1)
◽
pp. 118-121
◽
1989 ◽
Vol 39
(1-4)
◽
pp. 428-432
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