Size-dependency effect on design of harmonic AFM probe in the modified couple stress theory

Author(s):  
Shueei-Muh Lin ◽  
Ching-Yao Chang
2021 ◽  
Vol 2021 ◽  
pp. 1-11
Author(s):  
Shueei-Muh Lin ◽  
Ching-Yao Chang ◽  
Chihng-Tsung Liauh ◽  
Wen-Rong Wang

The conventional design of harmonic AFM probe geometry is made in neglect of the effects of the size-dependency factor and the tip-sample interacting force. Obviously, the effect of these two factors on the natural frequencies of a probe is significant. In this study, the effects of the two factors on the integer-multiples relation among frequencies are investigated. In this study, the effects of the two factors on the integer-multiples relation among frequencies are investigated. It is discovered that, in general, the integer-multiples relations of the probe’s frequencies in the classical model does not be kept as the same as that in the system with the effect of the size-dependency factor under the same material and geometry properties of probe. In addition, when the probe is used to measure the sample, the deviation of the relations will happen. The smaller the tip-sample distance is, the larger the deviation of integer-multiples frequencies is. The analytical method is presented here such that during scanning a sample at some tip-sample distance, the material and geometry properties of the probe can be tuned to the integer-multiples relation of resonant frequencies. Moreover, five similarity conditions among the systems with and without the effects of size-dependency and the tip-sample interacting force are discovered. According to these conditions, the integer-multiples relation is kept in different systems.


Author(s):  
M. H. Kahrobaiyan ◽  
I. Vardi ◽  
M. T. Ahmadian ◽  
S. Henein

The size-dependent static deflection, pull-in instability and resonant frequency of a circular microplate under capillary force have been studied using modified couple stress elasticity theory. Size-dependency is a phenomenon in which the normalized quantities that classical elasticity theory predicts to be independent of the structure size, such as normalized deflection or normalized frequency, vary significantly as the structure size changes. This phenomenon has been observed in micro-scale structures such as micro-electro-mechanical-systems (MEMS). Since classical elasticity theory is unable to predict the size-dependency, non-classical elasticity theories such as modified couple stress theory have been developed recently. In this paper, modified couple stress theory is used for the first time to develop the governing equation and boundary conditions of circular microplates when subjected to capillary force. Consideration of capillary force is important since it is has a significant role in the mechanical behavior and stability of micro-scale structures in the presence of a liquid bridge. We investigated the static deflection and pull-in instability of microplates using the Galerkin method to assess the effect of size-dependency for static deflection. We observed that, as the ratio of the microplate thickness to length scale parameter (an additional material property suggested in modified couple stress theory to capture the size-dependency) decreases, the normalized deflection of the microplate also decreases. We further observed that the difference between the normalized deflection predicted by classical elasticity theory and the one evaluated using modified couple stress theory is significant when thickness of the microplate is small, but diminishes as thickness increases. Furthermore, we defined a dimensionless number called the dimensionless capillary tension (DCT) as a function of the mechanical, geometrical and size-dependent properties of the microplate as well as the characteristics of the liquid bridge such as the contact angle and the interfacial tension. We showed that for DCT values greater than a threshold evaluated in this paper, pull-in instability happens and the microplate collapses to the substrate. Moreover, we evaluated the size-dependent resonant frequency of the microplate under capillary force as a function of the DCT and obtained the result that the frequency decreases as DCT increases. In addition, our investigation of size-dependency revealed that as the ratio of the microplate thickness to length scale parameter increases, the frequency decreases in a way that for large values of the ratio, it asymptotically approaches the value predicted by classical elasticity theory.


2019 ◽  
Vol 2019 ◽  
pp. 1-10 ◽  
Author(s):  
Shueei-Muh Lin ◽  
Ching-Yao Chang

The mathematical model of AFM probe subjected to multimode excitation based on the modified couple stress theory is presented. The semianalytical solution of the system is proposed. The transient behavior and response spectrum of AFM probe subjected to multimode excitation are investigated. It is very helpful to predict the nanotopography and surface properties based on the response of multimodes excitation. The effects of the root excitation, size parameter, and interacting distance on the response spectrum and frequency shift are investigated. The resonant frequency relation of the two systems with different size parameters is discovered and expressed in a formula. The natural frequencies predicted via the formula and those determined by the semianalytical method are significantly consistent.


Sign in / Sign up

Export Citation Format

Share Document