Effects of DC sputtering power and rapid thermal processing temperature on tungsten disulfide (WS2) thin films

2018 ◽  
Vol 676 (1) ◽  
pp. 105-113
Author(s):  
Sang Min Ma ◽  
Jongil Moon ◽  
Sang Jik Kwon ◽  
Eou-Sik Cho
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Tungsten Disulfide ◽  
Processing Temperature ◽  
Dc Sputtering ◽  
Sputtering Power

Effect of Rapid Thermal Processing on the Crystallization Properties of PbTiO3 Ferroelectric Thin Film

1996 ◽  
Vol 433 ◽  
Author(s):  
Jianguo Zhu ◽  
Meng Chen ◽  
Wenbing Peng ◽  
Fahua Lan ◽  
E.V. Sviridov ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thermal Processing ◽  
Interfacial Layer ◽  
Ion Beam ◽  
Semiconductor Devices ◽  
Rapid Thermal Processing ◽  
Ferroelectric Thin Film ◽  
Processing Temperature ◽  
Time Duration

AbstractThe fabrication methods of ferroelectric (FE) thin films have received special attention in recent years because of the needs of FE thin films integrated with semiconductor devices. Rapid thermal processing (RTP) has developed in fabrication of FE thin films because it can reduce processing temperature and time duration, and it also improves the properties of FE thin films compatible with semiconductor devices. The thin film samples used were prepared by a multi-ion-beam reactive cosputtering system (MIBRECS) at room temperature. The samples were then subjected to a post-deposition annealing in a RTP system. It was found that PbTiO3 (PT) thin film could grow on amorphous or polycrystal interfacial layer and the PT thin films annealed by RTP showed the prefered [110] and [100] textures. The effect of interfacial layer on the crystallization and microstructure of the films was also discussed.

Rapid thermal processing of zirconia thin films produced by the sol‐gel method

1991 ◽  
Vol 70 (4) ◽  
pp. 2348-2352 ◽  
Author(s):  
R. Pascual ◽  
M. Sayer ◽  
C. V. R. Vasant Kumar ◽  
Lichun Zou
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Sol Gel ◽  
Rapid Thermal Processing ◽  
Gel Method ◽  
Sol Gel Method

Effects of doping and rapid thermal processing in Y doped CdO thin films

2019 ◽  
Vol 776 ◽  
pp. 259-265 ◽  
Author(s):  
Mengting Xie ◽  
Wei Zhu ◽  
Kin Man Yu ◽  
Zishu Zhu ◽  
Guanzhong Wang
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Cdo Thin Films

scholarly journals Rapid thermal processing of self-assembling block copolymer thin films

2013 ◽  
Vol 24 (31) ◽  
pp. 315601 ◽  
Author(s):  
F Ferrarese Lupi ◽  
T J Giammaria ◽  
M Ceresoli ◽  
G Seguini ◽  
K Sparnacci ◽  
...  
Keyword(s):  
Thin Films ◽  
Block Copolymer ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Self Assembling

Surface microstructure of CIS thin films produced by rapid thermal processing

1994 ◽  
Vol 35 ◽  
pp. 129-139 ◽  
Author(s):  
W. Riedl ◽  
J. Rimmasch ◽  
V. Probst ◽  
F. Karg ◽  
R. Guckenberger
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Surface Microstructure

Fine Tuning of Lithographic Masks through Thin Films of PS-b-PMMA with Different Molar Mass by Rapid Thermal Processing

2014 ◽  
Vol 6 (10) ◽  
pp. 7180-7188 ◽  
Author(s):  
Federico Ferrarese Lupi ◽  
Tommaso Jacopo Giammaria ◽  
Gabriele Seguini ◽  
Francesco Vita ◽  
Oriano Francescangeli ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Molar Mass ◽  
Rapid Thermal Processing ◽  
Fine Tuning ◽  
Lithographic Masks

Effects of rapid thermal processing on chemically deposited antimony sulfide thin films

2018 ◽  
Vol 80 ◽  
pp. 9-17 ◽  
Author(s):  
V. Vinayakumar ◽  
C.R. Obregón Hernández ◽  
S. Shaji ◽  
D.A. Avellaneda ◽  
J.A. Aguilar Martinez ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Antimony Sulfide
Sign in / Sign up

Export Citation Format

Share Document