Stress relief and texture formation in aluminium nitride by plasma immersion ion implantation

2004 ◽  
Vol 16 (10) ◽  
pp. 1751-1760 ◽  
Author(s):  
B K Gan ◽  
M M M Bilek ◽  
D R McKenzie ◽  
Yang Shi ◽  
D A Tompsett ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Stress Relief ◽  
Aluminium Nitride ◽  
Texture Formation ◽  
Plasma Immersion Ion Implantation

Characterization of cathodic arc deposited titanium aluminium nitride films prepared using plasma immersion ion implantation

2005 ◽  
Vol 17 (17) ◽  
pp. 2791-2800 ◽  
Author(s):  
S H N Lim ◽  
D G McCulloch ◽  
M M M Bilek ◽  
D R McKenzie ◽  
S P Russo ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Aluminium Nitride ◽  
Plasma Immersion Ion Implantation ◽  
Cathodic Arc ◽  
Titanium Aluminium

TiN/ZrO2 multilayers synthesized on GCr15 bearing steel using plasma immersion ion implantation and deposition

2007 ◽  
Vol 201 (15) ◽  
pp. 6615-6618 ◽  
Author(s):  
Tao Sun ◽  
Langping Wang ◽  
Yonghao Yu ◽  
Yuhang Wang ◽  
Xiaofeng Wang ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Bearing Steel ◽  
Gcr15 Bearing Steel ◽  
Plasma Immersion Ion Implantation

A hard-tube pulser of 60 kV, 10 A for experiment and modeling in plasma immersion ion implantation

2000 ◽  
Vol 28 (5) ◽  
pp. 1392-1396 ◽  
Author(s):  
J.O. Rossi ◽  
M. Ueda ◽  
J.J. Barroso ◽  
V.A. Spassov
Keyword(s):  
Ion Implantation ◽  
Plasma Immersion Ion Implantation

Enhancing the blood response and antibacterial adhesion of titanium surface through oxygen plasma immersion ion implantation treatment

2019 ◽  
Vol 365 ◽  
pp. 173-178 ◽  
Author(s):  
Duen-Kai Shiau ◽  
Chih-Hsiung Yang ◽  
Ying-Sui Sun ◽  
Mei-Fang Wu ◽  
Haobo Pan ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Oxygen Plasma ◽  
Titanium Surface ◽  
Plasma Immersion Ion Implantation
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