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Variable electron beam diameter achieved by a titanium oxide/carbon nanotube hetero-structure suitable for nanolithography
Nanotechnology
◽
10.1088/0957-4484/24/5/055303
◽
2013
◽
Vol 24
(5)
◽
pp. 055303
◽
Cited By ~ 2
Author(s):
Yaser Abdi
◽
Fatemeh Barati
Keyword(s):
Electron Beam
◽
Carbon Nanotube
◽
Titanium Oxide
◽
Beam Diameter
◽
Hetero Structure
◽
Electron Beam Diameter
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References
Measurement of Electron Beam Diameter Fluctuated by AC Magnetic Field
Journal of Electron Microscopy
◽
10.1093/oxfordjournals.jmicro.a050781
◽
1990
◽
Cited By ~ 1
Keyword(s):
Magnetic Field
◽
Electron Beam
◽
Beam Diameter
◽
Ac Magnetic Field
◽
Electron Beam Diameter
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Deducing the Electron-Beam Diameter in a Laser-Plasma Accelerator Using X-Ray Betatron Radiation
Physical Review Letters
◽
10.1103/physrevlett.108.075001
◽
2012
◽
Vol 108
(7)
◽
Cited By ~ 60
Author(s):
Michael Schnell
◽
Alexander Sävert
◽
Björn Landgraf
◽
Maria Reuter
◽
Maria Nicolai
◽
...
Keyword(s):
Electron Beam
◽
Laser Plasma
◽
Plasma Accelerator
◽
Beam Diameter
◽
X Ray
◽
Laser Plasma Accelerator
◽
Electron Beam Diameter
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Application of gold plated edges for the measurement of the electron beam diameter
Microelectronic Engineering
◽
10.1016/0167-9317(91)90073-m
◽
1991
◽
Vol 13
(1-4)
◽
pp. 185-188
◽
Cited By ~ 1
Author(s):
M. Gentili
◽
L. Grella
◽
L. Luciani
◽
M. Baciocchi
◽
B.A. Wallman
Keyword(s):
Electron Beam
◽
Beam Diameter
◽
Electron Beam Diameter
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Technique to automatically measure electron-beam diameter and astigmatism: BEAMETR
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
◽
10.1116/1.2387158
◽
2006
◽
Vol 24
(6)
◽
pp. 2956
◽
Cited By ~ 15
Author(s):
S. Babin
◽
M. Gaevski
◽
D. Joy
◽
M. Machin
◽
A. Martynov
Keyword(s):
Electron Beam
◽
Beam Diameter
◽
Electron Beam Diameter
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Cathodoluminescence dependence on electron beam diameter
Materials Science and Engineering B
◽
10.1016/0921-5107(94)90316-6
◽
1994
◽
Vol 24
(1-3)
◽
pp. 141-143
◽
Cited By ~ 1
Author(s):
S. Achour
◽
M.T. Benlahrache
◽
A. Harabi
◽
N. Tabet
Keyword(s):
Electron Beam
◽
Beam Diameter
◽
Electron Beam Diameter
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Rapid determination of the electron-beam diameter
Scanning
◽
10.1002/sca.4950090106
◽
1987
◽
Vol 9
(1)
◽
pp. 32-35
◽
Cited By ~ 2
Author(s):
R. Hamerlik
Keyword(s):
Electron Beam
◽
Rapid Determination
◽
Beam Diameter
◽
Electron Beam Diameter
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Automatic measurement of electron-beam diameter and astigmatism: BEAMETR
Physics Procedia
◽
10.1016/j.phpro.2008.07.085
◽
2008
◽
Vol 1
(1)
◽
pp. 113-118
◽
Cited By ~ 3
Author(s):
S. Babin
◽
M. Gaevski
◽
D. Joy
◽
M. Machin
◽
A. Martynov
Keyword(s):
Electron Beam
◽
Automatic Measurement
◽
Beam Diameter
◽
Electron Beam Diameter
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Publisher’s Note: Deducing the Electron-Beam Diameter in a Laser-Plasma Accelerator Using X-Ray Betatron Radiation [Phys. Rev. Lett.108, 075001 (2012)]
Physical Review Letters
◽
10.1103/physrevlett.108.189907
◽
2012
◽
Vol 108
(18)
◽
Author(s):
Michael Schnell
◽
Alexander Savert
◽
Bjorn Landgraf
◽
Maria Reuter
◽
Maria Nicolai
◽
...
Keyword(s):
Electron Beam
◽
Laser Plasma
◽
Plasma Accelerator
◽
Beam Diameter
◽
X Ray
◽
Laser Plasma Accelerator
◽
Electron Beam Diameter
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Dependence of Electron Beam Diameter, Electron Energy, Resist Thickness and Resist Type for Forming Nano−sized Dot Arrays in EB Lithography by Using Monte Carlo Simulation.
American Journal of Nanoscience and Nanotechnology
◽
10.11648/j.nano.20130101.13
◽
2013
◽
Vol 1
(1)
◽
pp. 11
◽
Cited By ~ 2
Author(s):
Hui Zhang
Keyword(s):
Monte Carlo Simulation
◽
Monte Carlo
◽
Electron Beam
◽
Electron Energy
◽
Beam Diameter
◽
Electron Beam Diameter
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Electron-Beam Diameter Measurement Using a Knife Edge with a Visor for Scattering Electrons
Japanese Journal of Applied Physics
◽
10.1143/jjap.42.l491
◽
2003
◽
Vol 42
(Part 2, No. 5A)
◽
pp. L491-L493
◽
Cited By ~ 6
Author(s):
Kenji Yamazaki
◽
Hideo Namatsu
Keyword(s):
Electron Beam
◽
Beam Diameter
◽
Knife Edge
◽
Diameter Measurement
◽
Electron Beam Diameter
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