Modeling of low pressure plasma sources for microelectronics fabrication

2017 ◽  
Vol 50 (42) ◽  
pp. 424001 ◽  
Author(s):  
Ankur Agarwal ◽  
Kallol Bera ◽  
Jason Kenney ◽  
Alexandre Likhanskii ◽  
Shahid Rauf
Keyword(s):  
Low Pressure ◽  
Plasma Sources ◽  
Pressure Plasma ◽  
Low Pressure Plasma ◽  
Microelectronics Fabrication

Low-pressure plasma sources for etching and deposition

2002 ◽  
Vol 11 (3A) ◽  
pp. A74-A79 ◽  
Author(s):  
M J Cooke ◽  
G Hassall
Keyword(s):  
Low Pressure ◽  
Plasma Sources ◽  
Pressure Plasma ◽  
Low Pressure Plasma

Study of Electron Energy Distribution Functions (EEDFs) in Three DC Low-Pressure Plasma Sources

1998 ◽  
Vol 37 (Part 1, No. 12B) ◽  
pp. 6906-6915
Author(s):  
Tatjana Antonova ◽  
Gleb Bougrov ◽  
Antonina Bougrova ◽  
Won-Kook Choi ◽  
Leonid Goncharov ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Electron Energy ◽  
Low Pressure ◽  
Distribution Functions ◽  
Electron Energy Distribution ◽  
Plasma Sources ◽  
Pressure Plasma ◽  
Low Pressure Plasma ◽  
Energy Distribution Functions

Characteristics of Low Pressure Plasma Sprayed Alumina Coating

2009 ◽  
Vol 24 (1) ◽  
pp. 117-121 ◽  
Author(s):  
Chun-Ming DENG ◽  
Ke-Song ZHOU ◽  
Min LIU ◽  
Chang-Guang DENG ◽  
Jin-Bing SONG ◽  
...  
Keyword(s):  
Low Pressure ◽  
Alumina Coating ◽  
Pressure Plasma ◽  
Low Pressure Plasma ◽  
Plasma Sprayed

scholarly journals Effect of Low-Pressure Plasma Treatment Parameters on Wrinkle Features

Materials ◽  
2020 ◽  
Vol 13 (17) ◽  
pp. 3852
Author(s):  
Bongjun Gu ◽  
Dongwook Ko ◽  
Sungjin Jo ◽  
Dong Choon Hyun ◽  
Hyeon-Ju Oh ◽  
...  
Keyword(s):  
Power Flow ◽  
Treatment Time ◽  
Argon Plasma ◽  
Negative Ions ◽  
Low Pressure ◽  
Nitrogen Plasma ◽  
Pressure Plasma ◽  
Positive Ions ◽  
Low Pressure Plasma ◽  
Optical Adhesive

Wrinkles attract significant attention due to their ability to enhance the mechanical and optical characteristics of various optoelectronic devices. We report the effect of the plasma gas type, power, flow rate, and treatment time on the wrinkle features. When an optical adhesive was treated using a low-pressure plasma of oxygen, argon, and nitrogen, the oxygen and argon plasma generated wrinkles with the lowest and highest wavelengths, respectively. The increase in the power of the nitrogen and oxygen plasma increased the wavelengths and heights of the wrinkles; however, the increase in the power of the argon plasma increased the wavelengths and decreased the heights of the wrinkles. Argon molecules are heavier and smaller than nitrogen and oxygen molecules that have similar weights and sizes; moreover, the argon plasma comprises positive ions while the oxygen and nitrogen plasma comprise negative ions. This resulted in differences in the wrinkle features. It was concluded that a combination of different plasma gases could achieve exclusive control over either the wavelength or the height and allow a thorough analysis of the correlation between the wrinkle features and the characteristics of the electronic devices.

Polymer surface modification using He/O 2 RF remote low‐pressure plasma

2021 ◽  
Author(s):  
Saker Saloum ◽  
Samer Abou Shaker ◽  
Moneer Alwazzeh ◽  
Rokayya Hussin
Keyword(s):  
Surface Modification ◽  
Polymer Surface ◽  
Low Pressure ◽  
Pressure Plasma ◽  
Low Pressure Plasma ◽  
Polymer Surface Modification
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