Microstructure and phonon behavior in W/Si periodic multilayer structures
Abstract The crystallinity of the tungsten (W) phase was improved with an increase in the thickness of this layer in the periodic W/Si multilayer structure. Both the α- and β- W phases were grown simultaneously and the contribution of these phases has modified upon a change in the thickness of the W layers. For thinner W layers, the thermodynamically metastable β- W phase was dominated, and with an increase in thickness, this phase has suppressed, and the stable α- W phase became prominent. The crystallite size of these phases was almost linearly proportional to the thickness of the W layers in the multilayers. With the increase in thickness of Si layers in multilayers, Raman scattering showed a decrease in bond-angle deviation of Si-Si bonding in the amorphous Si phase. The study revealed, ordering of Si-Si bonding in the amorphous phase of Si with an increase in thickness of these layers in periodic W/Si multilayers.