scholarly journals Tuning the electronic properties of LaAlO3 / SrTiO3 interfaces by irradiating the LaAlO3 surface with low-energy cluster ion beams

2018 ◽  
Vol 97 (3) ◽  
Author(s):  
Karl Ridier ◽  
Damien Aureau ◽  
Bruno Bérini ◽  
Yves Dumont ◽  
Niels Keller ◽  
...  
Keyword(s):  
Electronic Properties ◽  
Ion Beams ◽  
Low Energy ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Energy Cluster

Low-energy irradiation effects of gas cluster ion beams

2008 ◽  
Vol 91 (2) ◽  
pp. 40-45 ◽  
Author(s):  
Shingo Houzumi ◽  
Keigo Takeshima ◽  
Kozo Mochiji ◽  
Noriaki Toyoda ◽  
Isao Yamada
Keyword(s):  
Ion Beams ◽  
Low Energy ◽  
Irradiation Effects ◽  
Cluster Ion Beams ◽  
Energy Irradiation ◽  
Cluster Ion

scholarly journals Low-Energy Irradiation Effects of Gas Cluster Ion Beams

2007 ◽  
Vol 127 (3) ◽  
pp. 312-316 ◽  
Author(s):  
Shingo Houzumi ◽  
Keigo Takeshima ◽  
Kozo Mochiji ◽  
Noriaki Toyoda ◽  
Isao Yamada
Keyword(s):  
Ion Beams ◽  
Low Energy ◽  
Irradiation Effects ◽  
Cluster Ion Beams ◽  
Energy Irradiation ◽  
Cluster Ion

Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor

2014 ◽  
Author(s):  
N. Toyoda ◽  
M. Kojima ◽  
R. Hinoura ◽  
A. Yamaguchi ◽  
K. Hara ◽  
...  
Keyword(s):  
Acetic Acid ◽  
Ion Beams ◽  
Acid Vapor ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Oxygen Gas
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