Real-time statistical process control using tool data (semiconductor manufacturing)

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/66.175363 ◽

1992 ◽

Vol 5 (4) ◽

pp. 308-318 ◽

Author(s):

C.J. Spanos ◽

H.-F. Guo ◽

A. Miller ◽

J. Levine-Parrill

Keyword(s):

Process Control ◽

Real Time ◽

Statistical Process Control ◽

Semiconductor Manufacturing ◽

Statistical Process

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Real-Time Statistical Process Control

Technometrics ◽

10.1080/00401706.1994.10485816 ◽

1994 ◽

Vol 36 (3) ◽

pp. 321-322

Author(s):

Eric R. Ziegel

Keyword(s):

Process Control ◽

Real Time ◽

Statistical Process Control ◽

Statistical Process

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Statistical Process Control for Monitoring the Particles With Excess Zero Counts in Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2018.2882862 ◽

2019 ◽

Vol 32 (1) ◽

pp. 93-103 ◽

Author(s):

Wenxing Tian ◽

Hailong You ◽

Chunfu Zhang ◽

Sheng Kang ◽

Xinzhang Jia ◽

...

Keyword(s):

Process Control ◽

Statistical Process Control ◽

Semiconductor Manufacturing ◽

Statistical Process ◽

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A computer-aided instructional tool for the teaching of real-time on-line statistical process control

10.31274/rtd-180813-6315 ◽

1988 ◽

Author(s):

Renford Adolphus Benito Brevett

Keyword(s):

Process Control ◽

Real Time ◽

Statistical Process Control ◽

Instructional Tool ◽

Statistical Process ◽

Computer Aided ◽

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Detecting mean changes in experience sampling data in real time: A comparison of univariate and multivariate statistical process control methods.

Psychological Methods ◽

10.1037/met0000447 ◽

2021 ◽

Author(s):

Evelien Schat ◽

Francis Tuerlinckx ◽

Arnout C. Smit ◽

Bart De Ketelaere ◽

Eva Ceulemans

Keyword(s):

Process Control ◽

Real Time ◽

Statistical Process Control ◽

Experience Sampling ◽

Multivariate Statistical Process Control ◽

Control Methods ◽

Multivariate Statistical ◽

Statistical Process

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Applying Real-Time Statistical Process Control to Manufacturing Processes Exhibiting Between and Within Part Size Variability in the Wood Products Industry

Quality Engineering ◽

10.1081/qen-120020778 ◽

2003 ◽

Vol 16 (1) ◽

pp. 113-125 ◽

Author(s):

Thomas C. Maness ◽

Robert A. Kozak ◽

Christina Staudhammer

Keyword(s):

Process Control ◽

Real Time ◽

Statistical Process Control ◽

Wood Products ◽

Manufacturing Processes ◽

Statistical Process ◽

Size Variability ◽

Wood Products Industry

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WE-D-204B-05: Online Monitoring and Error Detection of Real-Time Tumor Displacement Prediction Accuracy Using Statistical Process Control

Medical Physics ◽

10.1118/1.3469402 ◽

2010 ◽

Vol 37 (6Part13) ◽

pp. 3430-3430

Author(s):

KT Malinowski ◽

TJ Mc Avoy ◽

R George ◽

S Dieterich ◽

WD D'Souza

Keyword(s):

Process Control ◽

Real Time ◽

Statistical Process Control ◽

Error Detection ◽

Prediction Accuracy ◽

Online Monitoring ◽

Statistical Process ◽

Displacement Prediction

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A manufacturing driven 'real-time statistical process control' implementation model

10.1109/ismss.1989.77241 ◽

2003 ◽

Author(s):

S.J. Hunt

Keyword(s):

Process Control ◽

Real Time ◽

Statistical Process Control ◽

Statistical Process ◽

Implementation Model ◽

Control Implementation

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A computer aided method to statistical process control of an industrial process in real time

Conference Record of the 1992 IEEE Industry Applications Society Annual Meeting ◽

10.1109/ias.1992.244231 ◽

2003 ◽

Author(s):

A. Hossain ◽

Z.A. Choudhury ◽

S.M. Suyut

Keyword(s):

Process Control ◽

Real Time ◽

Statistical Process Control ◽

Industrial Process ◽

Statistical Process ◽

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Real time statistical process control for plasma etching

1991 Proceedings IEEE/SEMI International Semiconductor Manufacturing Science Symposium ◽

10.1109/ismss.1991.146278 ◽

2002 ◽

Author(s):

H.-F. Guo ◽

C.J. Spanos ◽

A.J. Miller

Keyword(s):

Process Control ◽

Real Time ◽

Statistical Process Control ◽

Plasma Etching ◽

Statistical Process

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A real-time information system for multivariate statistical process control

International Journal of Production Economics ◽

10.1016/s0925-5273(01)00189-x ◽

2002 ◽

Vol 75 (1-2) ◽

pp. 161-172 ◽

Author(s):

Rahul Singh ◽

Glenn Gilbreath

Keyword(s):

Information System ◽

Process Control ◽

Real Time ◽

Statistical Process Control ◽

Multivariate Statistical Process Control ◽

Multivariate Statistical ◽

Statistical Process ◽

Real Time Information ◽

Time Information

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