Design of a high-Q CMOS-compatible MEMS tunable capacitor for RF applications
2007 ◽
Vol 51
(3)
◽
pp. 191-194
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2000 ◽
Vol 24
(6)
◽
pp. 366-367
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2015 ◽
Vol 62
(2)
◽
pp. 265-273
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2008 ◽
Vol 18
(9)
◽
pp. 599-601
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2003 ◽
Vol 50
(3)
◽
pp. 730-739
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