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Pull-in curves determined with monolithic FEM models
EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
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10.1109/esime.2009.4938406
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2009
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Cited By ~ 1
Author(s):
Stephan D.A. Hannot
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Daniel J. Rixen
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