Surface processing by gas cluster ion beams

2002 ◽  
Author(s):  
N. Toyoda ◽  
J. Matsuo ◽  
I. Yamada
Keyword(s):  
Ion Beams ◽  
Surface Processing ◽  
Cluster Ion Beams ◽  
Cluster Ion

Low-damage surface processing by gas cluster ion beams

1995 ◽  
Vol 99 (1-4) ◽  
pp. 229-232 ◽  
Author(s):  
M. Akizuki ◽  
J. Matsuo ◽  
M. Harada ◽  
S. Ogasawara ◽  
A. Doi ◽  
...  
Keyword(s):  
Ion Beams ◽  
Surface Processing ◽  
Cluster Ion Beams ◽  
Cluster Ion

scholarly journals Surface Processing by Polyatomic Cluster Ion Beams

2011 ◽  
Vol 9 ◽  
pp. 168-172 ◽  
Author(s):  
Gikan H. Takaoka ◽  
Hiromichi Ryuto ◽  
Mitsuaki Takeuchi ◽  
Hiroshi Mukai
Keyword(s):  
Ion Beams ◽  
Surface Processing ◽  
Cluster Ion Beams ◽  
Cluster Ion

scholarly journals Surface processing using water cluster ion beams

2013 ◽  
Vol 307 ◽  
pp. 33-36 ◽  
Author(s):  
Gikan H. Takaoka ◽  
Hiromichi Ryuto ◽  
Mitsuaki Takeuchi ◽  
Gaku Ichihashi
Keyword(s):  
Water Cluster ◽  
Ion Beams ◽  
Surface Processing ◽  
Cluster Ion Beams ◽  
Cluster Ion

Surface processing by gas cluster ion beams at the atomic (molecular) level

1996 ◽  
Vol 14 (3) ◽  
pp. 781-785 ◽  
Author(s):  
I. Yamada ◽  
J. Matsuo ◽  
Z. Insepov ◽  
D. Takeuchi ◽  
M. Akizuki ◽  
...  
Keyword(s):  
Molecular Level ◽  
Ion Beams ◽  
Surface Processing ◽  
Cluster Ion Beams ◽  
Cluster Ion
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