scholarly journals Small-size MEMS Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation

Author(s):  
Vasco Lima ◽  
Jorge Cabral ◽  
Burkhard Kuhlmann ◽  
Joao Gaspar ◽  
Luis A. Rocha
Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1029 ◽  
Author(s):  
Vasco Lima ◽  
Jorge Cabral ◽  
Burkhard Kuhlmann ◽  
Luis Alexandre Rocha

Encapsulation of MEMS accelerometers in vacuum is advantageous, since it allows integration with other sensors, leading to size and cost reduction. One technique to operate MEMS accelerometers in vacuum is the use of closed-loop Sigma-Delta modulation, which has many advantages. In this paper, the design of a vacuum encapsulated small size MEMS accelerometer (0.2 mm2) and the preliminary measured results are presented. Experimental devices were fabricated and operated in 2nd and 3rd order Sigma-Delta modulators, achieving a noise figure of 389 µg/√Hz for a bandwidth of 200 Hz and a measurement range of at least ±1 g.


2007 ◽  
Vol 38 (3) ◽  
pp. 439-446 ◽  
Author(s):  
Thomas Johnson ◽  
Robert Sobot ◽  
Shawn Stapleton

2001 ◽  
Vol 47 (5) ◽  
pp. 1735-1744 ◽  
Author(s):  
C.S. Gunturk ◽  
J.C. Lagarias ◽  
V.A. Vaishampayan

Information ◽  
2021 ◽  
Vol 12 (10) ◽  
pp. 415
Author(s):  
Nuha A. S. Alwan ◽  
Zahir M. Hussain

This work combines compressive sensing and short word-length techniques to achieve localization and target tracking in wireless sensor networks with energy-efficient communication between the network anchors and the fusion center. Gradient descent localization is performed using time-of-arrival (TOA) data which are indicative of the distance between anchors and the target thereby achieving range-based localization. The short word-length techniques considered are delta modulation and sigma-delta modulation. The energy efficiency is due to the reduction of the data volume transmitted from anchors to the fusion center by employing any of the two delta modulation variants with compressive sensing techniques. Delta modulation allows the transmission of one bit per TOA sample. The communication energy efficiency is increased by RⱮ, R ≥ 1, where R is the sample reduction ratio of compressive sensing, and Ɱ is the number of bits originally present in a TOA-sample word. It is found that the localization system involving sigma-delta modulation has a superior performance to that using delta-modulation or pure compressive sampling alone, in terms of both energy efficiency and localization error in the presence of TOA measurement noise and transmission noise, owing to the noise shaping property of sigma-delta modulation.


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