Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources

2015 ◽  
Author(s):  
Reiho Amano ◽  
Thanh-Hung Dinh ◽  
Atsushi Sasanuma ◽  
Goki Arai ◽  
Yusuke Fujii ◽  
...  
Keyword(s):  
Rare Earth ◽  
Co2 Laser ◽  
Extreme Ultraviolet ◽  
Short Pulse

A 10 Hz Short-Pulse CO2 Laser System for Extreme Ultraviolet Source

2018 ◽  
pp. 367-371
Author(s):  
R. Amano ◽  
T. -H. Dinh ◽  
A. Sasanuma ◽  
G. Arai ◽  
Y. Fujii ◽  
...  
Keyword(s):  
Co2 Laser ◽  
Extreme Ultraviolet ◽  
Short Pulse ◽  
Laser System

Efficient extreme ultraviolet plasma source generated by a CO2 laser and a liquid xenon microjet target

2007 ◽  
Vol 90 (19) ◽  
pp. 191503 ◽  
Author(s):  
Yoshifumi Ueno ◽  
Tatsuya Ariga ◽  
George Soumagne ◽  
Takeshi Higashiguchi ◽  
Shoichi Kubodera ◽  
...  
Keyword(s):  
Co2 Laser ◽  
Extreme Ultraviolet ◽  
Plasma Source ◽  
Liquid Xenon

Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target

2007 ◽  
Vol 91 (23) ◽  
pp. 231501 ◽  
Author(s):  
Yoshifumi Ueno ◽  
Georg Soumagne ◽  
Akira Sumitani ◽  
Akira Endo ◽  
Takeshi Higashiguchi
Keyword(s):  
Co2 Laser ◽  
Extreme Ultraviolet ◽  
Ultraviolet Emission

scholarly journals Toward little heat-affected area of fused silica materials using short pulse and high power CO2 laser

2019 ◽  
Vol 12 ◽  
pp. 1363-1371 ◽  
Author(s):  
Linjie Zhao ◽  
Jian Cheng ◽  
Mingjun Chen ◽  
Xiaodong Yuan ◽  
Wei Liao ◽  
...  
Keyword(s):  
Co2 Laser ◽  
High Power ◽  
Short Pulse ◽  
Fused Silica ◽  
Affected Area ◽  
Silica Materials

Flexible CO2 laser system for fundamental research related to an extreme ultraviolet lithography source

2009 ◽  
Vol 80 (12) ◽  
pp. 123503 ◽  
Author(s):  
Y. Tao ◽  
M. S. Tillack ◽  
N. Amin ◽  
R. A. Burdt ◽  
S. Yuspeh ◽  
...  
Keyword(s):  
Co2 Laser ◽  
Extreme Ultraviolet ◽  
Laser System ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Fundamental Research

Multiline short-pulse solid-state seeded carbon dioxide laser for extreme ultraviolet employing multipass radio frequency excited slab amplifier

2013 ◽  
Vol 38 (6) ◽  
pp. 881 ◽  
Author(s):  
Krzysztof M. Nowak ◽  
Takeshi Ohta ◽  
Takashi Suganuma ◽  
Junichi Fujimoto ◽  
Hakaru Mizoguchi
Keyword(s):  
Carbon Dioxide ◽  
Solid State ◽  
Radio Frequency ◽  
Carbon Dioxide Laser ◽  
Extreme Ultraviolet ◽  
Short Pulse

Surface melting of Al–Cu–Mg alloy using a short-pulse, planar waveguide CO2 laser for corrosion resistance improvement

2003 ◽  
Vol 15 (4) ◽  
pp. 233-239 ◽  
Author(s):  
M. G. Tsagkarakis ◽  
F. J. Villarreal ◽  
H. J. Baker ◽  
D. R. Hall ◽  
S. W. Williams
Keyword(s):  
Corrosion Resistance ◽  
Co2 Laser ◽  
Planar Waveguide ◽  
Short Pulse ◽  
Surface Melting ◽  
Mg Alloy ◽  
Resistance Improvement

scholarly journals Flexible Hollow Light Guide for Higher Peak Short Pulse CO2 Laser

1987 ◽  
Vol 8 (3) ◽  
pp. 179-180
Author(s):  
Yuichi HASHISHIN ◽  
Uichi KUBO
Keyword(s):  
Co2 Laser ◽  
Light Guide ◽  
Short Pulse

scholarly journals A Method to Produce Short Pulse on a VHF-Plasma Excitation Slab-Type CO2 Laser.

2001 ◽  
Vol 29 (4) ◽  
pp. 251-255 ◽  
Author(s):  
Akira MORI ◽  
Yoshinobu HASHINISHI ◽  
Kaoru SUZUKI ◽  
Junji NAKATA
Keyword(s):  
Co2 Laser ◽  
Short Pulse ◽  
Plasma Excitation

Laser Desorption Combined with Laser Postionization for Mass Spectrometry

2019 ◽  
Vol 12 (1) ◽  
pp. 225-245 ◽  
Author(s):  
Luke Hanley ◽  
Raveendra Wickramasinghe ◽  
Yeni P. Yung
Keyword(s):  
Mass Spectrometry ◽  
Near Infrared ◽  
Extreme Ultraviolet ◽  
Short Pulse ◽  
Ambient Pressure ◽  
Pulse Length ◽  
Ultrashort Pulses ◽  
High Sensitivity ◽  
Laser Desorption ◽  
Direct Laser

Lasers with pulse lengths from nanoseconds to femtoseconds and wavelengths from the mid-infrared to extreme ultraviolet (UV) have been used for desorption or ablation in mass spectrometry. Such laser sampling can often benefit from the addition of a second laser for postionization of neutrals. The advantages offered by laser postionization include the ability to forego matrix application, high lateral resolution, decoupling of ionization from desorption, improved analysis of electrically insulating samples, and potential for high sensitivity and depth profiling while minimizing differential detection. A description of postionization by vacuum UV radiation is followed by a consideration of multiphoton, short pulse, and other postionization strategies. The impacts of laser pulse length and wavelength are considered for laser desorption or laser ablation at low pressures. Atomic and molecular analysis via direct laser desorption/ionization using near-infrared ultrashort pulses is described. Finally, the postionization of clusters, the role of gaseous collisions, sampling at ambient pressure, atmospheric pressure photoionization, and the addition of UV postionization to MALDI are considered.

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