Field emitter array patterning for large scale flat panel displays using laser interference lithography

Author(s):  
J.P. Spallas ◽  
R.D. Boyd ◽  
J.A. Britten ◽  
A. Fernandez ◽  
A.M. Hawryluk ◽  
...  
2014 ◽  
Vol 115 (13) ◽  
pp. 134506 ◽  
Author(s):  
Chrystian M. Posada ◽  
Edwin J. Grant ◽  
Ralu Divan ◽  
Anirudha V. Sumant ◽  
Daniel Rosenmann ◽  
...  

Micromachines ◽  
2017 ◽  
Vol 8 (6) ◽  
pp. 168 ◽  
Author(s):  
Adrien Chauvin ◽  
Nicolas Stephant ◽  
Ke Du ◽  
Junjun Ding ◽  
Ishan Wathuthanthri ◽  
...  

2014 ◽  
Vol 618 ◽  
pp. 146-149
Author(s):  
Lei Zhang ◽  
Ru Yi Xiang ◽  
Xiao Wen Cao ◽  
Shun Guang Li ◽  
Hui Chao Sun

Complex microstructures can be fabricated on nickel template directly by femtosecond laser. But the efficiency is low and much time is inevitable when large scale microstructures are fabricated. The multi-beam interference provides an effective method for fabrication of large scale microstructures. This paper mainly focuses on direct ablation of nickel template by four-beam interference and fabricating periodic microstructures by laser interference lithography. Experimental results show that submicron periodic stripes and column structures can be produced on the nickel template by laser interference, laying the foundation of making nickel molds for microfluidic chips.


Laser Physics ◽  
2009 ◽  
Vol 19 (3) ◽  
pp. 505-510 ◽  
Author(s):  
R. Sidharthan ◽  
F. Chollet ◽  
V. M. Murukeshan

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