µ-Coriolis Mass Flow Sensor with Differential Capacitive Readout
2012 ◽
Vol 39
(4)
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pp. 4418-4426
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Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2020 ◽
Vol 224
◽
pp. 111236
◽
Keyword(s):
Keyword(s):