Mode Measurement Of discharge-pumped KrF Laser Under High Repetition-rate Operation

2005 ◽  
Author(s):  
K. Kasuya ◽  
S. Matsuno ◽  
T. Suzuki ◽  
M. Watanabe ◽  
Y. Kawakita ◽  
...  
Keyword(s):  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Krf Laser

Electron-beam-pumped high-repetition-rate KrF laser system

2000 ◽  
Author(s):  
Eiichi Takahashi ◽  
Isao Okuda ◽  
Yuji Matsumoto ◽  
Isao Matsushima ◽  
Susumu Kato ◽  
...  
Keyword(s):  
Electron Beam ◽  
Repetition Rate ◽  
Laser System ◽  
High Repetition Rate ◽  
High Repetition ◽  
Krf Laser

High-Repetition-Rate Electron-Beam-Pumped KrF Laser Technology for Inertial-Fusion-Energy Drivers

2001 ◽  
Vol 40 (Part 1, No. 2B) ◽  
pp. 1152-1155 ◽  
Author(s):  
Isao Okuda ◽  
Eiichi Takahashi ◽  
Isao Matsushima ◽  
Yuji Matsumoto ◽  
Susumu Kato ◽  
...  
Keyword(s):  
Electron Beam ◽  
Repetition Rate ◽  
Fusion Energy ◽  
High Repetition Rate ◽  
Inertial Fusion ◽  
Inertial Fusion Energy ◽  
Laser Technology ◽  
High Repetition ◽  
Krf Laser

High repetition rate KrF laser plasma x-ray source for microlithography

1992 ◽  
Vol 17 (1-4) ◽  
pp. 219-222
Author(s):  
F. Bijkerk ◽  
E. Louis ◽  
E.C.I. Turcu ◽  
G.J. Tallents
Keyword(s):  
Laser Plasma ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
X Ray ◽  
High Repetition ◽  
Krf Laser

Initial testing of a high-repetition-rate electron-beam-pumped KrF laser amplifier

2001 ◽  
Vol 72 (5) ◽  
pp. 623-626 ◽  
Author(s):  
I. Okuda ◽  
J. Ma ◽  
E. Takahashi ◽  
I. Matsushima ◽  
Y. Matsumoto ◽  
...  
Keyword(s):  
Electron Beam ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
Laser Amplifier ◽  
Initial Testing ◽  
High Repetition ◽  
Krf Laser
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