Study of pulsed plasma doping by Langmuir probe diagnostics and ion mass-energy analyzer

2003 ◽  
Author(s):  
Bon-Woong Koo ◽  
Z. Fang ◽  
S. Felch
Keyword(s):  
Langmuir Probe ◽  
Pulsed Plasma ◽  
Energy Analyzer ◽  
Mass Energy ◽  
Probe Diagnostics ◽  
Plasma Doping

Study of pulsed plasma doping by Langmuir probe and ion mass-energy analyzer

2002 ◽  
Author(s):  
Ziwei Fang Ziwei Fang ◽  
Bon-Woong Koo Bon-Woong Koo ◽  
S. Felch ◽  
Yu Lei Yu Lei ◽  
L.J. Overzet ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Pulsed Plasma ◽  
Energy Analyzer ◽  
Mass Energy ◽  
Plasma Doping

The martian plasma environment: electric field and Langmuir probe diagnostics

2003 ◽  
Vol 31 (6) ◽  
pp. 1232-1236
Author(s):  
L.G. Blomberg ◽  
J.A. Cumnock ◽  
A.I. Eriksson
Keyword(s):  
Electric Field ◽  
Langmuir Probe ◽  
Plasma Environment ◽  
Probe Diagnostics

Langmuir probe diagnostics of an impulse magnetron discharge with hot Cr target

2019 ◽  
Vol 14 (09) ◽  
pp. C09026-C09026
Author(s):  
A.V. Tumarkin ◽  
A.V. Kaziev ◽  
K.A. Leonova ◽  
M.M. Kharkov ◽  
D.V. Kolodko ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Magnetron Discharge ◽  
Probe Diagnostics

Laser, spectroscopic, and Langmuir probe diagnostics of an inductively-coupled rf discharge H− ion source

1992 ◽  
Author(s):  
A. T. Young ◽  
D. A. Bachman ◽  
P. Chen ◽  
K. N. Leung ◽  
C. Y. Li ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Ion Source ◽  
Rf Discharge ◽  
Inductively Coupled ◽  
Probe Diagnostics ◽  
Laser Spectroscopic

Langmuir probe diagnostics of a plasma jet system

2008 ◽  
Vol 18 (1) ◽  
pp. 014009 ◽  
Author(s):  
M Tichý ◽  
Z Hubička ◽  
M Šícha ◽  
M Čada ◽  
J Olejníček ◽  
...  
Keyword(s):  
Langmuir Probe ◽  
Plasma Jet ◽  
Probe Diagnostics
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