Nanorobotic Strategies for Handling and Characterization of Metal-Assisted Etched Silicon Nanowires

2013 ◽  
Vol 18 (3) ◽  
pp. 887-894 ◽  
Author(s):  
Christian Stolle ◽  
Malte Bartenwerfer ◽  
Caroline Celle ◽  
Jean-Pierre Simonato ◽  
Sergej Fatikow
Keyword(s):  
Silicon Nanowires ◽  
Etched Silicon

Characterizing the Two-Dimensional Doping Concentration inside Silicon-Nanowires Using Scanning Spreading Resistance Microscopy

2009 ◽  
Vol 1178 ◽  
Author(s):  
Thomas Hantschel ◽  
Volker Schulz ◽  
Andreas Schulze ◽  
Esteban Angeletti ◽  
Firat Guder ◽  
...  
Keyword(s):  
Silicon Nanowires ◽  
Silicon Nanowire ◽  
Electronic Devices ◽  
Longitudinal Axis ◽  
Two Dimensional ◽  
Electrical Measurements ◽  
Spreading Resistance ◽  
Sectioning Method ◽  
Etched Silicon

AbstractThe characterization of doped regions inside silicon nanowire structures poses a challenge which must be overcome if these structures are to be incorporated into future electronic devices. Precise cross-sectioning of the nanowire along its longitudinal axis is required, followed by two-dimensional electrical measurements with nanometer spatial resolution. The authors have developed an approach to cross-section silicon nanowires and to characterize them by scanning spreading resistance microscopy (SSRM). This paper describes a cleaving- and polishing-based cross-sectioning method for silicon nanowires. High resolution SSRM measurements are demonstrated for epitaxially grown and etched silicon nanowires.

Characterization of Gold on Silicon Nanowires using Aberration-corrected STEM

2007 ◽  
Vol 13 (S02) ◽  
Author(s):  
SH Oh ◽  
K van Benthem ◽  
SI Molina ◽  
P Werner ◽  
D Kumar ◽  
...  
Keyword(s):  
Silicon Nanowires ◽  
Aberration Corrected Stem ◽  
Aberration Corrected

Preparation and characterization of silicon nanowires using SEM/FIB and TEM

2015 ◽  
Vol 106 (7) ◽  
pp. 697-702
Author(s):  
Sayanti Banerjee ◽  
Uwe Muehle ◽  
Markus Löffler ◽  
Andre Heinzig ◽  
Jens Trommer ◽  
...  
Keyword(s):  
Silicon Nanowires

High-resolution analytical electron microscopy of catalytically etched silicon nanowires

2009 ◽  
Vol 95 (2) ◽  
pp. 325-327 ◽  
Author(s):  
M. Schade ◽  
N. Geyer ◽  
B. Fuhrmann ◽  
F. Heyroth ◽  
H. S. Leipner
Keyword(s):  
Electron Microscopy ◽  
High Resolution ◽  
Silicon Nanowires ◽  
Analytical Electron Microscopy ◽  
Analytical Electron ◽  
Etched Silicon

Demonstration and Characterization of a Multi-Stage Silicon Microturbine

2005 ◽  
Author(s):  
Changgu Lee ◽  
Luc G. Fre´chette
Keyword(s):  
Layer Structure ◽  
Experimental Testing ◽  
Maximum Speed ◽  
Glass Wafer ◽  
Multi Stage ◽  
Calculation Results ◽  
Etched Silicon ◽  
Radial Outflow ◽  
Isentropic Efficiency

This paper presents the experimental testing and characterization of a microscale radial outflow turbine with four concentric stages. The device is a five layer structure composed of shallow and deep reactive ion etched silicon wafers and an ultrasonically drilled Pyrex glass wafer that are assembled using anodic and fusion bonding techniques. They enclose a 4mm diameter rotor that was spun up to 330,000 rpm and produced roughly 0.1W of mechanical power from each stage totaling 0.38W with 0.75 atm differential pressure across the microturbine. Modeling of the turbine based on a mean line analysis with loss correlations extracted from CFD suggests a turbine isentropic efficiency of 35% and Re=266 at the maximum speed. The pressure distribution across the blades rows was measured and showed close agreement with the calculation results. Using the model, the microturbine is predicted to produce 3.2 watts with an isentropic efficiency of 63% at a rotor speed of 1.1 million rpm.

FROM VAPOR-LIQUID-SOLID TO WET CHEMICALLY ETCHED SILICON NANOWIRES

2011 ◽  
Author(s):  
V. SIVAKOV ◽  
F. VOIGT ◽  
F. TALKENBERG ◽  
B. HOFFMANN ◽  
G. BRÖNSTRUP ◽  
...  
Keyword(s):  
Silicon Nanowires ◽  
Vapor Liquid Solid ◽  
Etched Silicon ◽  
Vapor Liquid

Characterization of silicon nanowires

2010 ◽  
Author(s):  
D.M.H. Leung ◽  
B.M.A. Rahman ◽  
H. Tanvir ◽  
M.A. Ashraf ◽  
N. Kejalakshmy ◽  
...  
Keyword(s):  
Silicon Nanowires

Synthesis and Characterization of Silicon Nanowires on Mesophase Carbon Microbead Substrates by Chemical Vapor Deposition

2005 ◽  
Vol 109 (8) ◽  
pp. 3291-3297 ◽  
Author(s):  
Wei-Na Li ◽  
Yun-Shuang Ding ◽  
Jikang Yuan ◽  
Sinue Gomez ◽  
Steven L. Suib ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Silicon Nanowires ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Synthesis And Characterization
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