Properties and morphology of TiN films deposited by atomic layer deposition
2014 ◽
Vol 19
(2)
◽
pp. 144-149
◽
2003 ◽
Vol 42
(Part 2, No. 4B)
◽
pp. L414-L416
◽
Keyword(s):
2003 ◽
Vol 42
(Part 1, No. 7A)
◽
pp. 4245-4248
◽
Keyword(s):
2018 ◽
Vol 36
(5)
◽
pp. 051505
◽
2018 ◽
Vol 36
(4)
◽
pp. 041501
◽
Keyword(s):
Keyword(s):
2012 ◽
Vol 1
(6)
◽
pp. P285-P290
◽
2004 ◽
Vol 24
(1-2)
◽
pp. 289-291
◽
Keyword(s):
Keyword(s):