Control-Oriented Modeling of Thermal Deformation of Machine Tools Based on Inverse Solution of Time-Variant Thermal Loads with Delayed Response

2004 ◽  
Vol 126 (2) ◽  
pp. 286-296 ◽  
Author(s):  
S. Fraser ◽  
M. H. Attia ◽  
M. O. M. Osman

With the new emerging technologies of high performance machining and the increasing demand for improved machining accuracy in recent years, the problem of thermal deformation of machine tool structures is becoming more critical than ever. The major problem in implementing real-time control systems is the difficulty of measuring the relative thermal displacement between the tool and the workpiece during machining. Therefore, the design of a generic multi-axis control system requires the development of control-based models to estimate the transient thermal load and the thermal deformation of the structure in real-time. To satisfy the stringent accuracy and stability requirements of the control system, a new inverse heat conduction problem IHCP solver is developed. This solution is capable of including the inertia effect and the delay in the thermal response, in order to accommodate situations where the measured points cannot be located near the heat source, which may be buried into the structure. Experimental validation of these models showed their inherent stability even when the temperature measurements are contaminated with random errors. The excellent computational efficiency of the integrated system, which is well suited for real-time control applications involving multi-dimensional structures, was achieved by incorporating an inverse numerical Laplace transformation procedure. The results also showed that the thermal deformation transfer function behaves as low-pass filters, and as such it attenuates the high frequency noise associated with temperature measurement error.

Author(s):  
S. Fraser ◽  
M. H. Attia ◽  
M. O. M. Osman

With the new emerging technologies of high performance machining and the increasing demand for improved machining accuracy in recent years, the problem of thermal deformation of machine tool structures is becoming more critical than ever. The major problem in implementing real-time control systems is the difficulty of measuring the relative thermal displacement between the tool and the workpiece during machining. Therefore, the design of a generic multi-axis control system requires the development of control-based models to estimate the transient thermal load and the thermal deformation of the structure in real-time. To satisfy the stringent accuracy and stability requirements of the control system, a new inverse heat conduction problem IHCP solver is developed. This solution is capable of including the inertia effect and the delay in the thermal response, in order to accommodate situations where the measured points cannot be located near the heat source, which may be buried into the structure. Experimental validation of these models showed their inherent stability even when the temperature measurement are contaminated with random errors. The excellent computational efficiency of the integrated system, which is well suited for real-time control applications involving multi-dimensional structures, was achieved by incorporating an inverse numerical Laplace transformation procedure. The result also showed that the thermal deformation transfer function behaves as low-pass filters, and as such it attenuates the high frequency noise associated with temperature measurement error.


1995 ◽  
Vol 389 ◽  
Author(s):  
K. C. Saraswat ◽  
Y. Chen ◽  
L. Degertekin ◽  
B. T. Khuri-Yakub

ABSTRACTA highly flexible Rapid Thermal Multiprocessing (RTM) reactor is described. This flexibility is the result of several new innovations: a lamp system, an acoustic thermometer and a real-time control system. The new lamp has been optimally designed through the use of a “virtual reactor” methodology to obtain the best possible wafer temperature uniformity. It consists of multiple concentric rings composed of light bulbs with horizontal filaments. Each ring is independently and dynamically controlled providing better control over the spatial and temporal optical flux profile resulting in excellent temperature uniformity over a wide range of process conditions. An acoustic thermometer non-invasively allows complete wafer temperature tomography under all process conditions - a critically important measurement never obtained before. For real-time equipment and process control a model based multivariable control system has been developed. Extensive integration of computers and related technology for specification, communication, execution, monitoring, control, and diagnosis demonstrates the programmability of the RTM.


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