Evaluation of a 100 kV thermal field emission electron-beam nanolithography system

2000 ◽  
Vol 18 (6) ◽  
pp. 3089 ◽  
Author(s):  
D. M. Tennant ◽  
R. Fullowan ◽  
H. Takemura ◽  
M. Isobe ◽  
Y. Nakagawa
Keyword(s):  
Electron Beam ◽  
Field Emission ◽  
Thermal Field ◽  
Emission Electron

Development of a 1-MV Field-Emission Electron Microscope III. Electron Optical Design and Development of Field-Emission Electron Gun

2000 ◽  
Vol 6 (S2) ◽  
pp. 1142-1143
Author(s):  
Takaho Yoshida ◽  
Takeshi Kawasaki ◽  
Junji Endo ◽  
Tadao Furutsu ◽  
Isao Matsui ◽  
...  
Keyword(s):  
Electron Beam ◽  
Field Emission ◽  
Optical Design ◽  
Electron Gun ◽  
Electron Holography ◽  
Optimized Design ◽  
Emission Electron ◽  
Transmission Electron ◽  
Electron Microscopes ◽  
Aharonov Bohm

Bright and coherent electron beams have been opening new frontiers in science and technology. So far, we have developed several field-emission transmission electron microscopes (FE-TEM) with increasing accelerating voltages to provide higher beam brightness. By using a 200-kV FE-TEM and electron holography techniques, we directly confirmed the Aharonov-Bohm effect. A 350-kV FE-TEM equipped with a low-temperature specimen stage enabled us to observe moving vortices in superconductors.2 Most Recently, we have developed a new 1-MV FE-TEM with a newly designed FE gun to obtain an even brighter and more coherent electron beam.Electron beam brightness, Br, defined in Figure 1, is suitable for measuring the performance of electron guns, since both lens aberrations and mechanical/electrical vibrations contribute to a decrease in beam brightness, and beam coherency is proportional to (Br)1/2. Therefore, we optimized design of the illuminating system and its operation by maximizing the electron beam brightness.

Fabrication and beam characteristics of an ultra-sharp electrode for field emission electron beam

2004 ◽  
Author(s):  
Seong-Soo Kim ◽  
Jong-Hang Lee ◽  
Youn-Chan Yim ◽  
Jung-Woo Hyun ◽  
Cheol-Woo Park ◽  
...  
Keyword(s):  
Electron Beam ◽  
Field Emission ◽  
Emission Electron ◽  
Beam Characteristics

Holographic contrast transfer theory

1992 ◽  
Vol 50 (2) ◽  
pp. 984-985
Author(s):  
R. Plass ◽  
L. D. Marks
Keyword(s):  
Electron Beam ◽  
Transfer Function ◽  
Field Emission ◽  
Electron Holography ◽  
Contrast Transfer Function ◽  
Beam Focusing ◽  
Emission Electron ◽  
Transmission Electron ◽  
Electron Microscopes ◽  
Image Position

With the advent of reliable cold field emission transmission electron microscopes there is substantial interest in using the amplitude and phase information recorded in electron holograms to optically or numerically correct for the coherent aberrations of transmission electron microscopes. However electron holography cannot compensate for incoherent aberrations. The derivation of the contrast transfer function for off axis electron holography in this paper shows there is no fundamental improvement in resolution for electron holography over conventional transmission electron microscopy.Evaluating the contrast transfer function involves mathematically following an electron beam through a field emission electron microscope set up for off axis electron holography. Due to the high coherence of the field emission electron beam coherent aberrations caused by the pre-specimen beam focusing system must be accounted for. Starting with a spacial frequency distribution, C(v), for the electron beam leaving the gun, the electron beam is limited by the condenser aperture and coherently aberrated by the condenser lens and objective pre-field as it passes to the specimen region:

YBCO SQUIDs fabricated by field-emission electron beam source

1999 ◽  
Vol 9 (2) ◽  
pp. 3089-3092
Author(s):  
S.-J. Kim ◽  
J. Chen ◽  
Y. Mizugaki ◽  
K. Nakajima ◽  
T. Yamashita
Keyword(s):  
Electron Beam ◽  
Field Emission ◽  
Beam Source ◽  
Emission Electron

Silicon field emission electron beam sources

1995 ◽  
Author(s):  
D. Palmer ◽  
J. Shaw ◽  
H. Gray ◽  
J. Mancusi ◽  
G.E. McGuire ◽  
...  
Keyword(s):  
Electron Beam ◽  
Field Emission ◽  
Emission Electron
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