Hydrogen-induced surface blistering of sample chuck materials in hydrogen plasma immersion ion implantation
2001 ◽
Vol 19
(5)
◽
pp. 2301-2306
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2002 ◽
Vol 156
(1-3)
◽
pp. 244-252
◽
2014 ◽
Vol 35
(4)
◽
pp. 452-454
◽
2005 ◽
Vol 26
(31)
◽
pp. 6129-6135
◽
2005 ◽
Vol 26
(2)
◽
pp. 90-92
◽
Keyword(s):
Study of silicon surface layers modified by hydrogen plasma immersion ion implantation and oxidation
2020 ◽
Vol 1492
◽
pp. 012056
Keyword(s):
1999 ◽
Vol 155
(1-2)
◽
pp. 75-78
◽