Noise analysis of MEMS gyroscope under force rebalance closed loop detection

Author(s):  
Feng Bu ◽  
Bo Fan ◽  
Shuwen Guo ◽  
Dacheng Xu ◽  
Heming Zhao
2020 ◽  
Vol 30 (5) ◽  
pp. 055007 ◽  
Author(s):  
Feng Bu ◽  
Xi Wang ◽  
Bo Fan ◽  
Shuwen Guo ◽  
Dacheng Xu ◽  
...  

2021 ◽  
pp. 115646
Author(s):  
Jianfang Chang ◽  
Na Dong ◽  
Donghui Li ◽  
Minghui Qin

Author(s):  
Maxime Duquesnoy ◽  
Raphaël Lévy ◽  
Jean-Michel Melkonian ◽  
Guillaume Aoust ◽  
Myriam Raybaut ◽  
...  

Sensors ◽  
2019 ◽  
Vol 19 (1) ◽  
pp. 185 ◽  
Author(s):  
Phillip Durdaut ◽  
Michael Höft ◽  
Jean-Michel Friedt ◽  
Enrico Rubiola

Surface acoustic wave (SAW) sensors in the form of two-port resonators or delay lines are widely used in various fields of application. The readout of such sensors is achieved by electronic systems operating either in an open-loop or in a closed-loop configuration. The mode of operation of the sensor system is usually chosen based on requirements like, e.g., bandwidth, dynamic range, linearity, costs, and immunity against environmental influences. Because the limit of detection (LOD) at the output of a sensor system is often one of the most important figures of merit, both readout structures, i.e., open-loop and closed-loop systems, are analyzed in terms of the minimum achievable LOD. Based on a comprehensive phase noise analysis of these structures for both resonant sensors and delay line sensors, expressions for the various limits of detection are derived. Under generally valid conditions, the equivalence of open-loop and closed-loop operation is shown for both types of sensors. These results are not only valid for SAW devices, but are also applicable to all kinds of phase-sensitive sensors.


Micromachines ◽  
2019 ◽  
Vol 10 (8) ◽  
pp. 496
Author(s):  
Cheng Li ◽  
Bo Yang ◽  
Xin Guo ◽  
Lei Wu

A digital excitation-calibration technique of dual-mass MEMS gyroscope for closed-loop mode-matching control is presented in this paper. The technique, which takes advantage of the symmetrical amplitude response of MEMS gyroscope, exploits a two-side excitation signal to actuate the sense mode to obtain the corresponding DC tuning voltage. The structural characteristics of dual-mass decoupled MEMS gyroscope and the tuning principle of excitation-calibration technique are introduced firstly. Then, the scheme of digital excitation-calibration system for the real-time mode-matching control is presented. Simultaneously, open-loop analysis and closed-loop analysis are deduced, respectively, to analyze the sources of tuning error and system stability. To verify the validity of the scheme and theoretical analysis, the system model was established by SIMULINK. The simulation results are proved to be consistent with the theoretical analysis, verifying the feasibility of the digital excitation-calibration technique. The control algorithms of the system were implemented with a FPGA device. Experimental results demonstrate that digital excitation-calibration technique can realize mode-matching within 1 s. The prototype with real-time mode-matching control has a bias instability of 0.813 ∘ /h and an ARW (Angular Random Walk) of 0.0117 ∘ / h . Compared to the mode-mismatching condition, the bias instability and ARW are improved by 3.25 and 4.49 times respectively.


Author(s):  
A. Albers ◽  
H. T. Nguyen ◽  
W. Burger

State of the art of hydrodynamic journal bearing lubrication is realized by a significant oversupply with lubricant, causing energy losses due to fluid film friction in the unloaded areas of the bearing. Reducing the lubricant flow however may lead to overheating or collapse of the load carrying fluid film, both resulting in a complete failure of the journal bearing. A new approach to safely reduce the lubricant flow is presented in this paper, by using a broadband piezoelectric acoustic emission sensor to detect ultrasonic structure-borne noise, usually caused by metal-to-metal contact at boundary conditions. The method of structure-borne noise analysis has proven to be suitable for detecting the occurrence of solid friction [1–4]. By combining structure-borne noise analysis with a closed loop control of a proportional flow control valve a condition dependent lubricant flow can be set. Thus lubricant friction in the bearing is reduced and additionally electrical energy in the peripheral devices, such as pumps can be saved.


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