Film thickness measurement tool with a stress measurement function

2008 ◽  
Author(s):  
Masahiro Horie ◽  
Kumiko Akashika ◽  
Shuji Shiota ◽  
Shinji Yamaguchi ◽  
Kakumichi Yamano
Keyword(s):  
Film Thickness ◽  
Stress Measurement ◽  
Thickness Measurement ◽  
Measurement Tool ◽  
Measurement Function ◽  
Film Thickness Measurement

Nanoscale film thickness measurement based on weak measurement

2020 ◽  
Vol 91 (12) ◽  
pp. 123111
Author(s):  
Zirui Qin ◽  
Qinggang Liu ◽  
Chong Yue ◽  
Yaopu Lang ◽  
Xinglin Zhou
Keyword(s):  
Film Thickness ◽  
Thickness Measurement ◽  
Weak Measurement ◽  
Film Thickness Measurement
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