Study on the growth and optical properties of ZnO thin films fabricated by ultrasonic spray pyrolysis

2018 ◽  
Vol 32 (29) ◽  
pp. 1850351 ◽  
Author(s):  
Weiguang Yang ◽  
Zhen Yang ◽  
Ding Li ◽  
Xiaoying Zhang ◽  
Ziliang Zhou ◽  
...  

In this paper, ZnO nanofilms are prepared on quartz substrate by ultrasonic spray pyrolysis (USP) technology. The effects of substrate temperature and deposition time on the micro-structural, morphological and optical properties of ZnO thin films are investigated in detail. Measurements indicate that the growth process of the film is as follows: Micro grains accumulation [Formula: see text] grains’ expansion [Formula: see text] grow into certain nanostructures under different temperature. Nanostructures of the film are as follows: Irregular broken hexagonal-like structure ([Formula: see text]C); coexisting of broken hexagonal- and sheet-like structure (450–500[Formula: see text]C); regular closed packed sheets-like structure ([Formula: see text]C). In addition, all results show that RMS roughness of the films is less than 20 nm. Moreover, the visible transmittance of these samples is higher than 90%. Which display that ZnO films with low roughness and excellent optical properties can be also fabricated by low-cost USP method.

2012 ◽  
Vol 2012 ◽  
pp. 1-7 ◽  
Author(s):  
Ebru Gungor ◽  
Tayyar Gungor

Using a modified ultrasonic spray pyrolysis (USP) system, ZnO thin films were deposited on the substrate moved back and forth (ZO1) and rotated (ZO3) as well as fixed (ZO2) in the conventional USP technique. Prepared thin films are pure ZnO with a preferred crystalline orientation of (0 0 2) in the hexagonal wurtzite structure. Diffraction angle shift implies a decrease lattice parameter alongc-axis anda-axis 0.2% and 0.3%, respectively. Maximum strain has been found for ZO1 which is about (−) 0.17%. These strain values show that presence of compressive strain due to moving substrates as depositing ZnO films. The film deposition process on the rotated quartz substrate is provided to obtain the thinner film. The grain size and root-mean- square value of roughness increase with thickness. Strong UV emission was observed at ∼390 nm assigned to the band gap transition from photoluminescence measurements. Energy shifted about 39 meV for ZO3 sample with respect to that of ZO2 film deposited in conventional USP system. This behaviour is confirmed with (002) diffraction peak shifting. So, the compressed lattice will provide a wider band gap for these films.E2phonon frequency values have not given a considerable shifting.


2016 ◽  
Vol 28 (1) ◽  
pp. 426-434
Author(s):  
Canyun Zhang ◽  
Jinfang Kong ◽  
Fengchao Wang ◽  
Jun Zou ◽  
Yaoqing Huang

2008 ◽  
Vol 53 (1) ◽  
pp. 192-195 ◽  
Author(s):  
Shavkat U. Yuldashev ◽  
Hee Chang Jeon ◽  
Tae Won Kang ◽  
Rafael A. Nusretov ◽  
Irina V. Khvan ◽  
...  

2019 ◽  
Vol 33 (22) ◽  
pp. 1950246
Author(s):  
Weiguang Yang ◽  
Miao He ◽  
Liu Yang ◽  
Ziliang Zhou ◽  
Xiaoying Zhang ◽  
...  

In this work, transparent and conductive Al-doped ZnO (AZO) nanofilms were prepared on quartz substrate by ultrasonic spray pyrolysis (USP) method. The effects of Al/Zn atomic ratios on the micro-structural, morphological, optical photoluminescence and electrical properties of AZO thin films were effectively investigated. All the prepared samples showed hexagonal wurtzite structure. The scanning electron microscopy (SEM) showed that the surface morphology of all samples changed with the substrate temperature. The average transmittance of all AZO samples was higher than 85% in the visible region. The photoluminescence (PL) spectrum of the samples showed that the near band edge emission in PL spectra shifted to shorter wavelengths with increasing Al-doped concentration. The lowest sheet resistance was obtained for the samples prepared with 4% at. Al-doped value. The electrical conductivity of AZO films was improved by Al doping, which allowed their use as optoelectronic materials.


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